Abstract:Scaled measurements of global space-charge induced image blur in electron beam projection systemVariable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems J.
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.