2016
DOI: 10.1109/tmag.2015.2497207
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CoPt Antidot Arrays Fabricated With Dry-Etching Using AAO Templates

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Cited by 5 publications
(3 citation statements)
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“…The nonexposed area transforms into insect-inspired nanopillars that remain on the substrate. 24 The polymer can be molded in the AAO template's nano-opening and replicated as nanoprojections on polymer surfaces. 6 Nanospheres can also be used as masks on a polymer substrate, with the exposed area between the nanospheres etched away by RIE.…”
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confidence: 99%
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“…The nonexposed area transforms into insect-inspired nanopillars that remain on the substrate. 24 The polymer can be molded in the AAO template's nano-opening and replicated as nanoprojections on polymer surfaces. 6 Nanospheres can also be used as masks on a polymer substrate, with the exposed area between the nanospheres etched away by RIE.…”
mentioning
confidence: 99%
“…A mask or mold with the desired dimensions of the target nanostructures is an essential first step. One of the techniques makes use of a commercially available anode aluminum oxide (AAO) template as a mask. , The plasma interacts with the substrate via the nanoscale opening of the AAO template and etches out the substrate. The nonexposed area transforms into insect-inspired nanopillars that remain on the substrate .…”
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confidence: 99%
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