Keywords: Thermal reaction mechanism / Gold / Silver / Copper / N ligands / Chemical vapor deposition Several guanidinates of copper and silver, as well as amidinates and guanidinates of gold were synthesized as potential precursors for vapour deposition methods. These compounds were found to be dimers in the case of copper and gold, and trimers in the case of silver. The copper compounds showed good thermal and photostability, and were isolable by sublimation. The silver compounds proved to be very reactive to both heat and light, and were found to deposit silver metal when heated, suggesting that these sensitive compounds might be used as single source precursors. The gold compounds were found to exhibit some heat and light sensitivity,