Abstract:We propose an optical characterization of complex nanostructured thin layers by spectroscopic ellipsometry. These layers are either made of spherical or ellipsoidal‐shaped cobalt particles buried in a silica thin layer on a silicon substrate. Conventional ellipsometry is used to characterize the optically isotropic layers. It is shown that these implanted layers can be represented by a stack of three sublayers: a Maxwell‐Garnett homogeneous mixture of silica and cobalt clusters sandwiched between two silica su… Show more
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