Controlling the Surface Roughness of Surface-Electrode Ion Trap Based on Micro-Nano Fabrication

Abstract

The surface-electrode ion trap is one of the most promising devices to realize large-scale and integrated quantum information processing. However, a series of problems are faced in the micro-nano fabrication of surface-electrode ion traps. A prominent one is the difficulty to control the thick film surface roughness. A rough electrode surface could produce excessive radio frequency (RF) loss and deteriorate trapping ability of the surface-electrode ion trap. In this paper, a thick film micro-nano fabrication technology to control the surface roughness is presented, which can reduce the roughness of thick film surface-electrode down to 6.2 nm, while being controllable between 6.2 nm and 45 nm. Therefore, it can also provide a basis for studying the influence of electrode surface roughness on trap performance. The micro-nano fabrication technology is not only suitable for surface-electrode ion traps with various configurations, but also be further applied to researches of MEMS, solar cells and surface science.

Depth profiling characterization of the titanium chemical state on electrode surfaces for technological applications

“…In all samples, the surface roughness of the newly formed titanium electrodes was estimated in tens of nanometers, 36 being sufficiently low to perform external total reflection of X-rays without any significant interference.…”

Modeling and Analysis of Device Orientation, Analog and Digital Performance of Electrode Design for High Speed Electro-Optic Modulator

“…Radiation losses depend on the surface roughness of the metal electrodes. Optimized fabrication techniques allow the RMS surface roughness value to be constrained within a few nanometers [27,28]; thus, the effects of surface roughness are neglected in device modeling considering the plain electrode deposition [12,21,22]. At an RF frequency of 100 GHz, w c and w g are varied for different h clad to study the variation in n eff , Z o and RF losses of CPW using COMSOL multiphysics solver.…”