Controlling Discharge Condition of PE-SION Deposition Process for Finding a Balance Between NH3 Outgassing and Surface-Remained NH<sub>4</sub>
                  <sup>+</sup>ions

Yang, Ki Dong; Suk, Keungjoo; Jeong, JaeIn; Hwang, Kwangtae; Lee, Joonho H.; Kim, Young Jeong; Jung, Youngsoo; Kim, Young Eun; Kim, Joong Jung

doi:10.1109/asmc61125.2024.10545473

2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2024

DOI: 10.1109/asmc61125.2024.10545473

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Controlling Discharge Condition of PE-SION Deposition Process for Finding a Balance Between NH3 Outgassing and Surface-Remained NH₄ ⁺ions

Ki Dong Yang,

Keungjoo Suk,

JaeIn Jeong

et al.

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Controlling Discharge Condition of PE-SION Deposition Process for Finding a Balance Between NH3 Outgassing and Surface-Remained NH₄ ⁺ions

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Controlling Discharge Condition of PE-SION Deposition Process for Finding a Balance Between NH3 Outgassing and Surface-Remained NH4 +ions

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References 7 publications

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Controlling Discharge Condition of PE-SION Deposition Process for Finding a Balance Between NH3 Outgassing and Surface-Remained NH₄ ⁺ions