Abstract:We combine focused ion beam patterning (FIB) and self-assembly of epitaxial quantum dots in order to produce regular quantum dot arrays. Island-shaped quantum dots are expected to nucleate at specifi c locations where the ion beam has formerly patterned the surface. Different ion beam patterning parameters are compared, including accelerating voltage, probe current, dwell time and pitch. Three different types of ion beam damage are explained. Secondary electron imaging (SEI) in a scanning electronic microscope… Show more
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