Controllable preparation of single-crystal diamond nanopillar clusters by metal cyclic dewetting process

Nanoscale Investigation on the Improvement of Electrical Properties of Boron-Doped Diamond Nanostructures for High-Performance Plasma Displays

“…In the case of a large Au mask, a BMCD L -like array of nanorods is formed (Figure d I ), referred to as BUNCD L . The diameter of the BUNCD L nanorods is approximately 50 nm (Figure d II ) and the length of these nanorods is approximately 260 nm (Figure d III ). , …”

“…The diameter of the BUNCD L nanorods is approximately 50 nm (Figure 3d II ) and the length of these nanorods is approximately 260 nm (Figure 3d III ). 6,35 If the RIE process is carried out in O 2 plasma, it is challenging to control the etching process, leading to the nonuniformity of diamond nanostructures. 34 Therefore, CF 4 is added to the O 2 plasma to control the nanostructuring of diamonds.…”

“…If the RIE process is carried out in O 2 plasma, it is challenging to control the etching process, leading to the nonuniformity of diamond nanostructures . Therefore, CF 4 is added to the O 2 plasma to control the nanostructuring of diamonds. , In addition, the advantage of Au masks in RIE is that the etching rate of Au-nanoparticles is relatively slower than that of diamond during the O 2 /CF 4 -based RIE process . The question now arises what key role do the different grain structures of BMCD P and BUNCD P films play in the formation of nanostructures by RIE.…”

“…To overcome these shortcomings, there is a need for a highly electrically conductive and robust material with a high ratio of electron emission sites. Recent studies believe that 1D nanostructures are suitable for higher quality PD. , Nanostructured materials such as graphene nanoribbons, carbon nanotubes (CNTs), , ZnO nanorod arrays, , and Si-nanofacets , have been investigated as potential cathode materials for PD. However, since the cathode material in plasma systems is constantly bombarded by ions, its stability becomes crucial.…”

Templated Synthesis of Diamond Nanopillar Arrays Using Porous Anodic Aluminium Oxide (AAO) Membranes

“…Top-down fabrication methods are the most widely applied, particularly the photolithography process coupled with reactive ion etching (RIE) [17]. Diamond single crystals or polycrystalline diamond films synthesized by chemical vapor deposition (CVD) can be etched anisotropically to produce periodic submicroscale cylinder arrays or diamond nanowires by using, among others, metal droplets [18,19], silica microspheres [20], or nanodiamond particles [21] as masks. The fabrication of periodic high-aspect-ratio nanopillar arrays by e-beam lithography (EBL) and the inductively coupled plasma (ICP) etching method has been demonstrated as well [22,23].…”