Controllable Preparation and Mechanism Study of Easy‐Peel High‐Density and Vertically Aligned Carbon Nanotube Forests
Sheng Wan,
Lu Xu,
Yongjie Yan
et al.
Abstract:The stripping of carbon nanotube forests (CNTF) is an urgent problem in terms of its application in thermal management and semiconductor devices. The easy‐peel and vertically aligned CNTF is prepared in a two‐step process of high vacuum magnetron sputtering and chemical vapor deposition. Based on the thick alumina buffer layer, CNTF with heights of 100 μm, 300 μm, and 500 μm was prepared by adjusting the magnetron sputtering power. Through SEM observation and calculation, the corresponding densities were 2.5 ×… Show more
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