Controllable micrometer positioning design of piezoelectric actuators using a robust fuzzy eliminator

Chen, Yung Yue; Li, Lin; Hung, Min Hao

doi:10.1016/j.microrel.2019.113497

Cited by 6 publications

(9 citation statements)

References 10 publications

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“…For example, the researchers in Ref. [ 51 ] make use of robust control techniques alongside fuzzy logic to learn the models of the actuators and mitigate the hysteresis. Their approach achieves an accuracy with a margin of error of 0.18

m. The authors of Ref.…”

Section: Introductionmentioning

confidence: 99%

Ultraprecise Controller for Piezoelectric Actuators Based on Deep Learning and Model Predictive Control

Uralde

Artetxe

Barambones

et al. 2023

Sensors

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Piezoelectric actuators (PEA) are high-precision devices used in applications requiring micrometric displacements. However, PEAs present non-linearity phenomena that introduce drawbacks at high precision applications. One of these phenomena is hysteresis, which considerably reduces their performance. The introduction of appropriate control strategies may improve the accuracy of the PEAs. This paper presents a high precision control scheme to be used at PEAs based on the model-based predictive control (MPC) scheme. In this work, the model used to feed the MPC controller has been achieved by means of artificial neural networks (ANN). This approach simplifies the obtaining of the model, since the achievement of a precise mathematical model that reproduces the dynamics of the PEA is a complex task. The presented approach has been embedded over the dSPACE control platform and has been tested over a commercial PEA, supplied by Thorlabs, conducting experiments to demonstrate improvements of the MPC. In addition, the results of the MPC controller have been compared with a proportional-integral-derivative (PID) controller. The experimental results show that the MPC control strategy achieves higher accuracy at high precision PEA applications such as tracking periodic reference signals and sudden reference change.

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m. The authors of Ref.…”

Section: Introductionmentioning

confidence: 99%

Ultraprecise Controller for Piezoelectric Actuators Based on Deep Learning and Model Predictive Control

Uralde

Artetxe

Barambones

et al. 2023

Sensors

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“…Among them, Bouc-Wen model which is with a set of first-order nonlinear differential equations can properly and precisely present the hysteresis behavior of the controlled piezoelectric actuator, and this model provides the advantages of computational simplicity and practical similarity. Besides, a variety of control designs based on linear approximation models of piezoelectric actuators have been proposed, such as proportional-integral-derivative control designs [5], robust control design [6], sliding mode control designs [7,8], linear model-based adaptive control design [9], and so on in the past two decades. Most of these published papers took linear models with or without hysteresis into account when designing the corresponding controllers, and the linear properties of models and controllers limited their good control performances only in some specific cases.…”

Section: Introductionmentioning

confidence: 99%

“…These linear control designs possess the advantages of an easy to implement control structure and a low calculation consumption. Recently, nonlinear control designs for piezoelectric actuators were proposed [9,10]. [10] delivered a neural network-based control design which requires a huge convergence time for adjusting weights of the backpropagation neural network, and convergence of the displacement tracking error cannot be guaranteed and proven mathematically.…”

Section: Introductionmentioning

confidence: 99%

“…[10] delivered a neural network-based control design which requires a huge convergence time for adjusting weights of the backpropagation neural network, and convergence of the displacement tracking error cannot be guaranteed and proven mathematically. A nonlinear robust fuzzy eliminator with two approximators for learning the disturbed piezoelectric actuator model and eliminating hysteresis is investigated in [9]. In this investigation, positioning performance can be guaranteed and the controlled piezoelectric actuator has an lm positioning accuracy.…”

Section: Introductionmentioning

confidence: 99%

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Micrometer Level Control Design of Piezoelectric Actuators: Fuzzy Approach

Chen

Gieng

Liao

et al. 2021

Int. J. Fuzzy Syst.

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In this investigation, a fuzzy-based micrometer level control design with a guaranteed trajectory tracking performance for piezoelectric actuators which naturally have hysteresis effects is proposed. Nominal dynamics of the controlled piezoelectric actuators are described by adopting Takagi and Sugeno fuzzy models initially. Via interpolating Takagi and Sugeno local fuzzy model, a robust fuzzy-based controller is developed to eliminate hysteresis, modeling uncertainties and external disturbances. Meanwhile, the tracking error is expected to be reduced as small as possible with respect to all bounded desired trajectories. This proposed fuzzy-based controller has an easy to implement control structure. The trajectory tracking design problem of piezoelectric actuators of this study is transferred to a linear matrix inequality problem, and based on the convex optimization technique, the solution of the trajectory tracking design problem of piezoelectric actuators can be solved efficiently. From the simulation results, it is obvious that this proposed fuzzy-based control design possesses robustness property and can converge tracking errors to zero in micrometer level.

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“…The flexure hinge enables smooth and continuous movement via elastic deformation. PZT actuators have been widely used as fine-positioning-devices because of their advantages such as high positioning resolution, high generative force, high response speed and easy miniaturization (Fantoni et al , 2018; Wang et al , 2018; Chen et al , 2019; Jian et al , 2019). Therefore, many studies have been conducted on the design and manufacture of precision-positioning stages using flexure hinges and PZT actuators (Park et al , 2007; Jung and Kim, 2014; Clark et al , 2015; Qin et al , 2019; Tian et al , 2019; Zhang et al , 2020).…”

Section: Introductionmentioning

confidence: 99%

Fabrication of a piezoelectrically driven micropositioning 3-DOF stage with elastic body using a multi-material 3D printer

Baek

Cho

Lee

2020

RPJ

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Purpose This paper aims to propose a method for manufacturing multi-material monolithic structures with flexible materials to construct the elastic body by using a dual-nozzle three-dimensional printer to develop a piezoelectric (PZT)-driven micropositioning stage with three degrees of freedom (3-DOF) and flexure hinges. Design/methodology/approach Polylactic acid (PLA) and nylon were used for the lever structure’s frame and flexure hinge, respectively. Additionally, the stage consisted of three PZT actuators for fine movement in the nanometer scale in 3-DOF (x, y and θ-directions). For the design of the stage, the kinematic analysis model and the finite element method (FEM) analysis was undertaken for comparing between PLA with nylon (multi-material), PLA (single material) and aluminum (conventional-material). In addition, two verification experiments were implemented for the fabricated prototype stage. First, to evaluate various assessments (lever ratio, hysteresis, coupling error and resolution), a measurement is carried out using the three capacitive sensors. Then, a two-camera-vision measurement experiment was performed to verify the displacement and lever ratio over the full-scale working range of the fabricated positioning stage, and the results from the experimentation and the FEM analysis were compared. Findings The authors confirmed enhancements in the properties of the lever structure frame, which requires stiffness and of the hinge, which requires flexibility for elastic deformation. Comparing FEM analysis and experimental results, although the performance as shown by experimental results was lower: the maximum difference being 3.4% within the end-point working range; this difference was sufficient to be a plausible alternative for the aluminum-based stage. Originality/value Multi-material monolithic-structure fabrication has an effective advantage in improving the performance of the stage, by using a combination of materials capable of reinforcing the desired characteristics in the necessary parts. It was verified that the fabricated stage can substitute the aluminum-based stage and can achieve a higher performance than single-material stages. Thus, precise-positioning stages can be manufactured in many kinds of structures with various properties and contribute to weight reduction and low costs for application equipment.

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Controllable micrometer positioning design of piezoelectric actuators using a robust fuzzy eliminator

Cited by 6 publications

References 10 publications

Ultraprecise Controller for Piezoelectric Actuators Based on Deep Learning and Model Predictive Control

Ultraprecise Controller for Piezoelectric Actuators Based on Deep Learning and Model Predictive Control

Micrometer Level Control Design of Piezoelectric Actuators: Fuzzy Approach

Fabrication of a piezoelectrically driven micropositioning 3-DOF stage with elastic body using a multi-material 3D printer

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