Controllable fabrication of the micropore shape of two-dimensional photonic crystals using holographic lithography

Hsieh, Mei-Li; Lan, Yi-Sheng

doi:10.1116/1.2905240

Cited by 7 publications

(3 citation statements)

References 16 publications

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“…Here ρ is carefully chosen to produce a perfect super-collimation effect for later discussions. For practical applications, the rods should have a gap of at least 50 nm between them for reproducible fabrication [27,28]. For the PC considered here, the minimum gap between the rods is 66.7 nm (>50 nm), which satisfies the demand for reproducible fabrication.…”

Section: Structure and Transmission Characteristicsmentioning

confidence: 90%

Highly efficient beam combiner based on the super-collimation effect in photonic crystals with elliptical rods

Liang¹,

Chen²,

Yin³

et al. 2014

J. Opt.

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Broadband and wide-angle high coupling efficiency into elliptical-rod-type photonic crystals (PCs) without modifications to the interface is reported. It is found that high transmission can exist not only in the second band but also in the fourth band due to the unique band structure resulting from the elliptical symmetry of the rods. The relative bandwidths of high transmission for the second and fourth bands reach 18.52% and 7.03%, respectively. Finite-difference time-domain simulations show that more than 96% of power can be efficiently coupled into the PC for wide in-plane incident angles from 0° to 25° over these two high transmittance bands. The physical mechanism for such high transmission is analyzed. The above results hold promise for designing compact and efficient dispersion-based PC devices. As an example, we design a super-collimation-based beam combiner exhibiting high transmittance, broad bandwidth, and wide acceptance angles simultaneously.

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Section: Structure and Transmission Characteristicsmentioning

confidence: 90%

Highly efficient beam combiner based on the super-collimation effect in photonic crystals with elliptical rods

Liang¹,

Chen²,

Yin³

et al. 2014

J. Opt.

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“…To achieve hole or dot arrays with a square symmetry, a second exposure after rotating the sample by 90 • is performed. In the same way, a double exposure at 60 • using an interferometer provides a hexagonal pattern, but the geometry of each pillar has an elliptical shape along the [210] direction of the two-dimensional (2D) lattice due to the intensity distribution of the double exposure of the laser interference fringes, which is undesirable for most applications [8][9][10][11]. For instance, the elliptical patterns lead to unwanted polarization effects due to the asymmetric geometry [8].…”

Section: Introductionmentioning

confidence: 99%

“…For instance, the elliptical patterns lead to unwanted polarization effects due to the asymmetric geometry [8]. To overcome this problem, some researchers have used multiple beam exposures to create hexagonal symmetry patterns [9][10][11]. While these setups are very flexible for forming various Bravais lattices, there are tedious spatial-phase alignment issues between exposures.…”

Section: Introductionmentioning

confidence: 99%

Six-fold hexagonal symmetric nanostructures with various periodic shapes on GaAs substrates for efficient antireflection and hydrophobic properties

Leem

Song

2011

Nanotechnology

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We fabricated various periodic nanostructures with a six-fold hexagonal symmetry on gallium arsenide (GaAs) substrates using simple process steps, together with a theoretical analysis of their antireflective properties. Elliptical photoresist (PR) nanopillars, which are inevitably generated by the asymmetric intensity distribution of the laser interference, were converted to rounded lens-like patterns by a thermal reflow process without any additional complex optic systems, thus leading to an exact six-fold hexagonal symmetry. Various shaped periodic nanostructures including nanorods, cones, truncated cones, and even parabolic patterns were obtained under different etching conditions using the rounded lens-like PR patterns formed by the reflow process. For the parabolic structure, the calculated lowest average reflectance of ∼ 2.3% was obtained. To achieve better antireflection characteristics, an aluminum-doped zinc oxide (AZO) film was deposited on the GaAs parabolas, which forms an AZO/GaAs parabolic nanostructure. The structure exhibited a low average reflectance of ∼ 1.2% over a wide wavelength region of 350-1800 nm and a hydrophobic surface with a water contact angle of θ(c) ∼ 115°. The calculated reflectances were reasonably consistent with the measured results.

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Nondestructive nanoscale profile measurement on two-dimensional photonic crystal structure using differential confocal microscopy

Kuo

Juang

et al. 2009

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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In this study, the authors evaluated the effectiveness of using the nanometer depth sensitivity of differential confocal microscopy (DCM) to measure the surface profile of the two-dimensional (2D) photonic crystal structure. The depth of the micropore on the 2D hexagonal photonic crystal sample can be measured within 4.2nm resolution. The surface profile of the 2D photonic crystal structure on the photoresist can be obtained by the nondestructive and noncontact DCM method, and the results were comparable to those from the commercial atomic force microscope method.

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Controllable fabrication of the micropore shape of two-dimensional photonic crystals using holographic lithography

Cited by 7 publications

References 16 publications

Highly efficient beam combiner based on the super-collimation effect in photonic crystals with elliptical rods

Highly efficient beam combiner based on the super-collimation effect in photonic crystals with elliptical rods

Six-fold hexagonal symmetric nanostructures with various periodic shapes on GaAs substrates for efficient antireflection and hydrophobic properties

Nondestructive nanoscale profile measurement on two-dimensional photonic crystal structure using differential confocal microscopy

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