Controllable Fabrication of Non-Close-Packed Colloidal Nanoparticle Arrays by Ion Beam Etching

Abstract

Polystyrene (PS) nanoparticle films with non-close-packed arrays were prepared by using ion beam etching technology. The effects of etching time, beam current, and voltage on the size reduction of PS particles were well investigated. A slow etching rate, about 9.2 nm/min, is obtained for the nanospheres with the diameter of 100 nm. The rate does not maintain constant with increasing the etching time. This may result from the thermal energy accumulated gradually in a long-time bombardment of ion beam. The etching rate increases nonlinearly with the increase of beam current, while it increases firstly then reach its saturation with the increase of beam voltage. The diameter of PS nanoparticles can be controlled in the range from 34 to 88 nm. Based on the non-close-packed arrays of PS nanoparticles, the ordered silicon (Si) nanopillars with their average diameter of 54 nm are fabricated by employing metal-assisted chemical etching technique. Our results pave an effective way to fabricate the ordered nanostructures with the size less than 100 nm.

Nanosphere Lithography: A Versatile Approach to Develop Transparent Conductive Films for Optoelectronic Applications

“…Size control of shrunk particles in a tightly packed periodic PS array is important to create mesh structures and extend the application of NSL. To this end, RIE, [ 97,98 ] ion beam etching (IBE), [ 99 ] plasma etching (PE), [ 21,85,97,100,101 ] and inductively coupled plasma etching (ICPE) [ 102,103 ] can be used. Different gases including O 2 , [ 85,104,105 ] Ar, [ 85 ] O 2 /Ar, [ 21 ] or CF 4 /O 2 [ 106 ] are applicable for the plasma etching processes, resulting in varied etching speeds and particle surface roughness.…”

“…Mask Modification: Size control of shrunk particles in a tightly packed periodic PS array is important to create mesh structures and extend the application of NSL. To this end, RIE, [97,98] ion beam etching (IBE), [99] plasma etching (PE), [21,85,97,100,101] and inductively coupled plasma etching (ICPE) [102,103] can be used.…”

Polarized SERS substrates with directionality, repeatability and orderability: an anisotropic Ag nanocavity array

“…As reported in a previous study of ion-beam etching parameters, the morphology of the etched sample mainly depends on the ion-beam incident angle and the beam current. 38 We use the same conditions and different etching times to etch silver films with different thicknesses. The base side of the triangle decreases from 300 nm to 0 nm, but the height remains the same when the silver film thickness increases from 60 nm to 90 nm, even to 120 nm and 150 nm.…”

Nano-Modified Titanium Implant Materials: A Way Toward Improved Antibacterial Properties

“…The methods of this kind of synthesis include self assembly ( Zhang et al, 2019b ; Deng et al, 2020 ), laser pyrolysis ( Laurent et al, 2010 ; Dumitrache et al, 2019 ), condensation ( Sano et al, 2020 ), CVD ( Gutés et al, 2012 ; Tyurikova et al, 2020 ), sol-gel method ( Gonçalves, 2018 ), soft lithography ( Fu et al, 2018 ), hydrothermal methods ( Zhen et al, 2019 ; Moreira et al, 2020 ), microwave methods ( Henam et al, 2019 ), sonochemical ( Gupta and Srivastava, 2019 ; Moreira et al, 2020 ), synthesis using plant extracts ( Ogunyemi et al, 2019 ; Ranoszek-Soliwoda et al, 2019 ), and green synthesis ( Gour and Jain, 2019 ; Irshad et al, 2020 ). On the other hand, macroscopic level materials can be trimmed down to NPs by different methods, including mechanical grinding ( Sviridov et al, 2017 ; Haque et al, 2018 ), ball milling ( Li Y. et al, 2020 ), lithography ( Fu et al, 2018 ), vapor deposition ( Choi et al, 2018 ), arc-plasma deposition ( Ito et al, 2012 ; Takahashi et al, 2015 ), ion beam technique ( Heo and Gwag, 2014 ; Yang J. et al, 2018 ), severe plastic deformation ( Cui et al, 2018 ; Sarkari Khorrami et al, 2019 ), chemical etching ( Wareing et al, 2017 ; Pinna et al, 2020 ), sputtering ( Pišlová et al, 2020 ), and laser ablation ( Pandey et al, 2014 ; Abid et al, 2020 ).…”