2005
DOI: 10.3166/ejc.11.384-395
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Control Strategies Towards Faster Quantitative Imaging in Atomic Force Microscopy

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Cited by 26 publications
(13 citation statements)
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“…Generally, inverse compensation-based damping has an advantage in that we can extend the scanner bandwidth. This damping method is much easier to apply for the x-scanner than for the z-scanner, because for the former, the scan waves are known beforehand and are periodic (hence, the frequencies used are discrete; integral multiples of the fundamental frequency) [93][94][95]. Here, we first consider the damping of the x-scanner vibrations.…”
Section: Feedforward Control For Active Dampingmentioning
confidence: 99%
“…Generally, inverse compensation-based damping has an advantage in that we can extend the scanner bandwidth. This damping method is much easier to apply for the x-scanner than for the z-scanner, because for the former, the scan waves are known beforehand and are periodic (hence, the frequencies used are discrete; integral multiples of the fundamental frequency) [93][94][95]. Here, we first consider the damping of the x-scanner vibrations.…”
Section: Feedforward Control For Active Dampingmentioning
confidence: 99%
“…The active damping of the x-scanner is easy because their scan speed is not high, and their scan waves are known beforehand and periodic, and therefore, feedforward control for active damping can be implemented in a digital mode [18]- [20]. When the line scan was performed at 3.3 kHz without damping, its displacement exhibited vibrations [ Fig.…”
Section: A Active Damping Of X-scannermentioning
confidence: 99%
“…Commercial AFMs are typically controlled with basic Proportional (P), Proportional-Integral (PI), ProportionalIntegral-Derivative (PID), Proportional-Double-Integral (PII), or Proportional-Double-Integral-Derivative (PIID) compensators [11], [23], [25], [31], [35]. Here, F = 0, and for a PIID feedback controller for the Z motion direction, a continuous-time compensator transfer function is…”
Section: Control Of Afmsmentioning
confidence: 99%
“…Stemmer and others have reported faster and more accurate imaging results using SISO ℓ 1 -optimal feedback and feedforward controllers [20], [35] for the vertical (Z-direction) scanner position. In the ℓ 1 framework, the goal is to minimize the maximum or peak deviations of signals.…”
Section: B ℓ 1 Controlmentioning
confidence: 99%