“…Another radiation-resistant material, high-resistivity silicon, has better mechanical characteristics and many technological processes can be applied to its treatment. These capabilities were used in the creation of a set of binary diffraction optical elements (DOEs) [12], [13]. That enabled splitting the laser beam into three beams, shaping of the laser beam into given volumes, transformation of laser beam modes, uniform illumination of a square area, and, finally, formation of beams with orbital angular momentum.…”