Control of plasma profile in microwave discharges via inverse-problem approach

Yasaka, Yasuyoshi; Tobita, Naoki; Tsuji, Akihiro

doi:10.1063/1.4840735

Cited by 7 publications

(3 citation statements)

References 12 publications

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“…Some efforts of simulation-based optimization of process systems have been presented by Chiu et al, 25 Mitrovic et al, 26 Cheng et al, 27 and Po et al 28 A positive simulation model integrated with an optimal algorithm is a preferred architecture for these approaches to solve the inverse problems. Yasaka et al 29,30 briefly elaborated this inverse problem and proposed a novel simulation-based approach that made the plasma profile approximate the expected one via an appropriate control of the input power along the radial direction of the electrode. Additionally, the inverse problem is similar to a closed-loop control system, so it may be a feasible solution to employ an appropriate system control strategy.…”

Section: Introductionmentioning

confidence: 99%

“…Yasaka et al. 29,30 briefly elaborated this inverse problem and proposed a novel simulation-based approach that made the plasma profile approximate the expected one via an appropriate control of the input power along the radial direction of the electrode. Additionally, the inverse problem is similar to a closed-loop control system, so it may be a feasible solution to employ an appropriate system control strategy.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

New simulation-based approach for the profile control in a process chamber: Fluid, thermal, and plasma profile

Xiang

Xia

Wang

et al. 2015

Proceedings of the Institution of Mechanical Engineers, Part E:

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Process chamber is the core unit of chemical vapor deposition and etching, and the physical fields in it have fatal effect on process quality. It is significant and difficult for improving the process performance to regulate the fields' profiles finely. Two design solutions for the profile regulation are proposed: controllable type and resistance type. A novel profile error feedback method is presented, and a simulation-based auto-design framework is established. The profile error feedback method is in a quasi-closed-loop-control mode. It starts from an initial guessed sequence of the design/control variables and predicts a better sequence via feedback of the profile error between the output-targeted profile and the expected one. It never stops until the profile error is narrowed in the preset tolerance. Three kinds of numerical experiments about the regulation of the thermal, fluid, and plasma profile are set to test the effectiveness and feasibility of the profile error feedback method and the two kinds of design schemes.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

New simulation-based approach for the profile control in a process chamber: Fluid, thermal, and plasma profile

Xiang

Xia

Wang

et al. 2015

Proceedings of the Institution of Mechanical Engineers, Part E:

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“…In this paper we present a two-dimensional calculation of wave propagation and power absorption in a nonuniform plasma immersed in non-uniform static magnetic field [8] based on the linear hot plasma theory. Bidirectional property of the helical antenna is investigated numerically by using a simple model antenna that approximates the helical antenna.…”

Section: Introductionmentioning

confidence: 99%

Bi-Directional Excitation of Radio Frequency Waves Using a Helical Antenna in Non-Uniform Plasmas towards a Compact Magnetoplasma Thruster

Yasaka¹,

Hayashi²,

Takeno³

et al. 2014

OJAppS

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Magnetoplasma thruster is one of the attractive plasma engines for space propulsion in future manned deep space exploration. Usually two helical antennas are equipped to produce and heat plasmas with separate radio frequency sources. It is presented in this paper that a helical antenna, which is used to launch one wave mode in one direction so far, exhibits bi-directional nature, where the waves with different mode numbers are launched and couple with electrons and ions selectively in opposite directions. A two-dimensional numerical calculation is performed to predict wave propagation and power absorption in a non-uniform hydrogen plasma immersed in a non-uniform external static magnetic field, based on the hot plasma theory. It is confirmed that appropriate choice of the excitation condition of the antenna can select axial propagation direction of specific wave modes and consequently select a species that absorbs power from generated waves. A small-scale experiment is performed to confirm the prediction of the calculation. By measuring a change in electron and ion temperatures due to the wave launch from the helical antenna, it is found that both the production and heating at different axial positions are accomplished simultaneously by one antenna showing that another type of the radio frequency driven magnetoplasma thruster would be achieved.

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How to Control Plasma Parameters

Baranov

Levchenko

et al. 2020

Advanced Concepts and Architectures for Plasma-Enabled Material Processing

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Control of plasma profile in microwave discharges via inverse-problem approach

Cited by 7 publications

References 12 publications

New simulation-based approach for the profile control in a process chamber: Fluid, thermal, and plasma profile

New simulation-based approach for the profile control in a process chamber: Fluid, thermal, and plasma profile

Bi-Directional Excitation of Radio Frequency Waves Using a Helical Antenna in Non-Uniform Plasmas towards a Compact Magnetoplasma Thruster

How to Control Plasma Parameters

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