Imaging and Applied Optics Technical Papers 2012
DOI: 10.1364/oft.2012.om4d.1
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Control of Mid-spatial-frequency Errors for Large Steep Aspheric Surfaces

Abstract: Control of mid-spatial-frequency errors on precision optical surfaces is very important for next-generation optical systems. We present results of smoothing experiments and of polishing runs utilizing figuring and smoothing for the 8.4m GMT off-axis segment.OCIS codes: (220.0220) Optical design and fabrication; (220.5450) Polishing

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Cited by 10 publications
(5 citation statements)
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“…This resembles a big challenge for the manufacturing process of precision optics. The demand for tools, techniques and strategies to avoid the MSFE is increasing [1][2][3][4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…This resembles a big challenge for the manufacturing process of precision optics. The demand for tools, techniques and strategies to avoid the MSFE is increasing [1][2][3][4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…Because the intrinsic tool motion induces this on the unit under fabrication, all traditional large optics suffer from those errors. Many research groups, including our group, have been investigating those errors [10][11][12][13]. In order to control mid-to-high frequency, recognition of the error is an essential step, but this is a challenging metrology goal due to the large required measurable range of the testing instrument.…”
Section: The Mid-to-high Frequency Error In the Optical Systemmentioning
confidence: 99%
“…Stressed-lap polishing with a diameter of 1 m was developed. After polishing, full surface roughness and form accuracy reached 20 nm Ra and less than 1 μm, respectively [162] The second principle of bonnet polishing is to use a kind of motion called 'precession,' which is different from the 'rotation' and 'translation' of a traditional polishing tool [164][165][166]. The precession motion is divided into two parts:…”
Section: Stressed-lap Polishingmentioning
confidence: 99%