1999
DOI: 10.1111/j.1151-2916.1999.tb02091.x
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Control of Microstructure and Orientation in Solution‐Deposited BaTiO3 and SrTiO3 Thin Films

Abstract: Columnar and highly oriented (100) BaTiO3 and SrTiO3 thin films were prepared by a chelate‐type chemical solution deposition (CSD) process by manipulation of film deposition conditions and seeded growth techniques. Randomly oriented columnar films were prepared on platinum‐coated Si substrates by a multilayering process in which nucleation of the perovskite phase was restricted to the substrate or underlying layers by control of layer thickness. The columnar films displayed improvements in dielectric constant … Show more

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Cited by 146 publications
(89 citation statements)
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References 43 publications
(80 reference statements)
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“…Stoichiometric barium titanate chemical solutions were formed from a hybrid-chelate chemistry with acetic acid substituted as a solvent [28,29]. Titanium isopropoxide was reacted with 2,4 pentanedione and diethanolamine in molar ratios of 1:2 and 4:1, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…Stoichiometric barium titanate chemical solutions were formed from a hybrid-chelate chemistry with acetic acid substituted as a solvent [28,29]. Titanium isopropoxide was reacted with 2,4 pentanedione and diethanolamine in molar ratios of 1:2 and 4:1, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…This is a common occurrence for structures prepared through special synthesis processes. For example, the c/a ratios of some films with c-orientation texture, are all relatively large as reported in literature [15][16][17]. Each lattice cell contains eight …”
Section: Resultsmentioning
confidence: 76%
“…The orientation degree of the (hk 0 ) plane was calculated from (3) deduced from a formula in literature [15] O hk0 = (I 220 + I 440 )/I 311sample (I 220 + I 440 )/I 311standard .…”
Section: Resultsmentioning
confidence: 99%
“…A large exothermic DTA peak between 250 and 650 °C indicates the further decomposition of the precursors, consisting of two main steps in the TGA signal. It is generally accepted that BTO is formed from reaction between TiO 2 and BaCO 3 or from an intermediate such as Ba 2 Ti 2 O 5 CO 3 for aqueous sol-gel precursors [11,17,18]. Given most of the reaction is complete by 650 °C, we believe that the mixed intermediate can play a role here since BaCO 3 reacts only at much higher temperature.…”
Section: Methodsmentioning
confidence: 97%