2017
DOI: 10.1016/j.jcrysgro.2016.10.041
|View full text |Cite
|
Sign up to set email alerts
|

Control of heat transfer in continuous-feeding Czochralski-silicon crystal growth with a water-cooled jacket

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

0
2
0
1

Year Published

2017
2017
2023
2023

Publication Types

Select...
8
1

Relationship

0
9

Authors

Journals

citations
Cited by 29 publications
(4 citation statements)
references
References 21 publications
0
2
0
1
Order By: Relevance
“…Table 1 lists the properties of the main substances, including the thermal properties and emissivity. The unique properties of silicon, graphite as a cooling system pipes, inert gases, such as argon, quartz crucibles (silica) and iron (steel), carbon felt as a thermal insulator, and water as a cooling system, which all influence the growth of the crystals, are used [18][19][20].…”
Section: Mathematical Modeling and Experimentsmentioning
confidence: 99%
“…Table 1 lists the properties of the main substances, including the thermal properties and emissivity. The unique properties of silicon, graphite as a cooling system pipes, inert gases, such as argon, quartz crucibles (silica) and iron (steel), carbon felt as a thermal insulator, and water as a cooling system, which all influence the growth of the crystals, are used [18][19][20].…”
Section: Mathematical Modeling and Experimentsmentioning
confidence: 99%
“…Nevertheless, it is very difficult to detect the S-L interface in the actual production process of Czochralski silicon single crystal. Therefore, if it is possible to predict the shape of the S-L interface and the thermal stress on the interface through calculation, this will be an important basis for the process optimization and thermal zone optimization design [14][15][16][17][18][19][20][21][22] of low-defect single crystal silicon.…”
Section: Introductionmentioning
confidence: 99%
“…Despite these advantages for cast silicon, the market share of Cz silicon is steadily growing and already exceeded the share of cast silicon in 2019, a trend which is expected to continue in the next years. This observation reflects the difference in technology optimization where Cz silicon production is benefitting from recent developments like multiple ingot pulling by recharging, continuous-feeding or increased growth rate by adapted cooling schemes [7].…”
Section: Introductionmentioning
confidence: 99%