2014
DOI: 10.1016/j.jpcs.2013.08.014
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Control of composition and crystallinity in hydroxyapatite films deposited by electron cyclotron resonance plasma sputtering

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Cited by 15 publications
(21 citation statements)
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“…Crack-free ACP deposits of 300 -500 nm thick with smooth morphologies were manufactured at room temperature, which were transformed into HA deposits after annealing in presence of oxygen [266]. However, crack-free HA deposits of high hardness and the specific crystallographic orientations were manufactured when Xe gas was used and Si (100) substrates were heated to 450 -500 °C from their rear [267]. Similar results were obtained for sapphire substrates [268].…”
Section: Accepted Manuscriptmentioning
confidence: 53%
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“…Crack-free ACP deposits of 300 -500 nm thick with smooth morphologies were manufactured at room temperature, which were transformed into HA deposits after annealing in presence of oxygen [266]. However, crack-free HA deposits of high hardness and the specific crystallographic orientations were manufactured when Xe gas was used and Si (100) substrates were heated to 450 -500 °C from their rear [267]. Similar results were obtained for sapphire substrates [268].…”
Section: Accepted Manuscriptmentioning
confidence: 53%
“…A C C E P T E D M A N U S C R I P T ACCEPTED MANUSCRIPT 18 To sputter materials, several types of the techniques are used, such as: ion beam [216][217][218][219][220][221][222][223][224][225][226], radio-frequency (RF) magnetron [227-244k], pulsed laser [58,75,232,, electroncyclotron-resonance plasma [266][267][268], diode, direct current and reactive sputtering or deposition [269,270]. However, since CaPO 4 belong to the electrically insulating materials, the last three techniques cannot be used for their spattering.…”
Section: Vapor Deposition Techniquesmentioning
confidence: 99%
“…The textural index R by Low [26] and the textural degree index DR indicate that the HAPs in bones of Cololabis saira have a strong (47-96%) preferring orientation along the crystallographic c-axis. The preferring orientation of biominerals is determined by the function of the hard tissue [38], it makes the physical properties the best anisotropism in nano-size [39] and possesses the lowest surface free energy [40] and can resist the damage from the outside [41]. During the biomineralization, HAPs are controlled strictly by organic molecules and prefer orientation along the crystallographic c-axis nearly parallel to the collagen fibers' axis [42,43].…”
Section: Orientation Of Hapmentioning
confidence: 99%
“…HA has been used as a bioactive coating to improve the osteoconductivity of metallic implants. In addition to plasma spray deposition, a large number of coating techniques have been proposed for HA deposition on titanium implants, such as the sol-gel process [3], electrodeposition [4], pulsed laser deposition (PLD) [5], electron and ion beam deposition [6,7], electroncyclotron-resonance (ECR) [8], and radio-frequency magnetron sputtering (RFMS) [9].…”
Section: Introductionmentioning
confidence: 99%
“…However, it is difficult to produce a thin coating without the formation of undesirable and amorphous phases [12][13][14][15][16]. Coatings are generally treated at temperatures of up to 900°C to transform amorphous phases into HA [8,15,16]. However, this thermal treatment may produce undesirable phases such as tricalcium phosphate (α,β -TCP) and calcium oxide (CaO) and cause the coatings to crack [6,8,12,[15][16][17][18].…”
Section: Introductionmentioning
confidence: 99%