Control of Ag acceptor concentration and pn-junction depth in single crystalline Mg2Si photodiodes
S. Sakane,
H. Udono
Abstract:We have investigated the relationship between the Ag concentration and the pn-junction depth in the Mg2Si pn-junction photodiodes fabricated by thermal diffusion of the Ag acceptor. The Ag concentration profiles and pn-junction depths in the samples annealed between 400 and 550 °C were studied by secondary ion mass spectroscopy and electron beam-induced current (EBIC) images. We observed two kinds of lattice diffusions of substitutional and interstitial Ag atoms with two different diffusion coefficients, of wh… Show more
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