Control of Active Microvibration Isolation Equipment by Consideration of the Air Pressure Characteristics in a Tube

Maekawa, Sachio; Wada, Masaomi; Tagawa, Yasutaka; Imaoka, Shizuo; Hayatsu, Masaki

doi:10.1299/jsdd.1.129

Cited by 6 publications

(3 citation statements)

References 6 publications

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“…In this paper, the proposed sensor is applied as direct FF sensor of floor vibration utilizing the VCM. Although the effects of the floor vibration FF are generally shown in frequency responses of transmissibility, this paper shows the results in time responses as well as [5]. Moreover, we combine the FF with acceleration PI-FB as to improve the effects of the FF itself and the anti-vibration performance of AVA.…”

Section: Introductionmentioning

confidence: 86%

Implementation of floor vibration feedforward using an absolute displacement sensor combined with acceleration PI feedback

Kai

Nakamura

Wakui

2012

2012 IEEE International Conference on Industrial Technology

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In the field of vibration control of semiconductor exposure equipments, commercial accelerometers have been used as feed forward sensors of floor vibrations. In order to suppress direct motion i.e., disturbances against an isolated table, the equipments have air springs in anti-vibration apparatuses. Therefore, once integration was required to provide the floor vibration feed forward, even when we utilized an integral characteristic of the air spring. In this paper, an absolute displacement sensor is utilized instead of the accelerometers to detect velocity and displacement signals of the floor vibration, and these signals are directly fed back to a voice coil motor as feedforward signals. Then, we can implement the floor vibration feedforward without amplifications of the pink-noise in low frequency. Although the effects of the feedforward are generally investigated in frequency responses of transmissibility, we evaluate time responses. As a result, transmissions of the floor vibrations are successfully suppressed on the isolated table.

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Section: Introductionmentioning

confidence: 86%

Implementation of floor vibration feedforward using an absolute displacement sensor combined with acceleration PI feedback

Kai

Nakamura

Wakui

2012

2012 IEEE International Conference on Industrial Technology

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“…For this reason, researchers proposed many active control schemes to improve the passive pneumatic isolation performance. Several actuators are applied for the active vibration isolators, including electro-magnetic (Yoshioka et al, 2001;Zhang et al, 2002;Abakumov and Miatov, 2006), piezoelectric (El-Sinawi and Kashani, 2001;Pasco and Berry, 2006), and pneumatic actuators (Chen and Shih, 2007;Kato et al, 2007;Maekawa et al, 2007). These contributions demonstrate the feasibility of enhancing isolation performance when using active control techniques.…”

Section: Introductionmentioning

confidence: 96%

Robust control of a novel active pneumatic vibration isolator through floor vibration observer

Chen

Shih

2010

Journal of Vibration and Control

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Active vibration control techniques have been widely applied to enhance passive vibration isolators. The active strategy can improve the common disadvantages of the passive pneumatic isolator, such as resonant character and poor isolation performance at low frequency. In the study, a novel active pneumatic vibration isolator is designed. The isolator uses a passive isolator to support the weight of the payload and a pneumatic actuator to suppress the vibration disturbance through active control strategy. This investigation proposes a robust H 1 controller in order to have good disturbance rejection ability and robustness. According to the linearized nominal plant and appropriate weighting functions, the robust controller can be obtained and implemented by measuring vibration of payload and disturbance. However, it costs higher in practical implementation because two precision accelerometers must be used to measure the vibration at the same time. Therefore, the proportional integral observer (PI observer) is designed to estimate the disturbance and achieve trade-off between cost and performance. Because the PI observer can also estimate the state variables of the active isolation system, the linear quadratic control is also adopted to compare the isolation results with robust control strategies. The simulations and the experimental results show that the proposed robust control scheme improves the disadvantages of the passive pneumatic isolator. Furthermore, the PI observer can estimate the disturbance precisely, and almost the same isolation performance is met comparing to direct disturbance measurement.

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“…[6] considered the vibration control of a one degree-of-freedom AVA, which has a single air spring, the suppression of the rotation of the isolated table was not discussed. The attitude control methods that reduce effects of floor vibration were proposed in [8]- [11], whereas the effects of the time delays were not considered. Ref.…”

mentioning

confidence: 99%

Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom

Goto

Nakamura

Wakui

2014

2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics

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Pneumatic anti-vibration apparatuses (AVAs), which have air springs, are needed for the precision positioning of wafer stages in lithography equipment. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including difference time delays. To avoid the rotation of the isolated table, a Smith predictor is employed. It is verified that this approach can be used for the AVAs with mode control, which is often used in vibration isolation systems for semiconductor manufacturing. The overshoot of the rotational angle of the isolated table can be further reduced by shaping the reference trajectory.

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Control of Active Microvibration Isolation Equipment by Consideration of the Air Pressure Characteristics in a Tube

Cited by 6 publications

References 6 publications

Implementation of floor vibration feedforward using an absolute displacement sensor combined with acceleration PI feedback

Implementation of floor vibration feedforward using an absolute displacement sensor combined with acceleration PI feedback

Robust control of a novel active pneumatic vibration isolator through floor vibration observer

Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom

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