1991
DOI: 10.1016/0094-5765(91)90045-7
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Control issues of microgravity vibration isolation

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Cited by 12 publications
(3 citation statements)
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“…Agnes et al [6] described the vibration problems and solutions typical of "ghter aircraft. Space applications vary in scope from structural control such as demonstrated by the INFLEX experiment [7] to microgravity isolation [8]. Recently, application of vibration isolation to the Space Shuttle was studied by Lee-Glauser et al [9] and the Space Station vibration control was discussed by Ellison et al [10].…”
Section: Introductionmentioning
confidence: 99%
“…Agnes et al [6] described the vibration problems and solutions typical of "ghter aircraft. Space applications vary in scope from structural control such as demonstrated by the INFLEX experiment [7] to microgravity isolation [8]. Recently, application of vibration isolation to the Space Shuttle was studied by Lee-Glauser et al [9] and the Space Station vibration control was discussed by Ellison et al [10].…”
Section: Introductionmentioning
confidence: 99%
“…Passive vibration isolation, which is reliable to isolate high-frequency vibration, has a poor performance in microvibration frequency range [1]. Due to the extremely small stiffness needed to isolate such low-frequency base disturbances, active vibration isolation offers significant advantages over passive systems [2].…”
Section: Introductionmentioning
confidence: 99%
“…Most of the previous works have focused on isolation from seismic movement; therefore, most of the works have dealt with relatively large amplitude motion [5]. The previous studies on semiconductor processing equipment are more relevant to our work [8,9]; however, none of these designs achieved adequate performance for M 3 .…”
Section: Introductionmentioning
confidence: 99%