Control for Multi-DOF Micro-Order Planar Motion Stage Based on Sliding Mode Observer

Abstract

In this paper, a novel partial sensorless control (PSC) has been tailored to multi-DOF precision positioning issue for Sawyer motor-based planar motion stage. For the position estimation, a Sliding Mode Observer based technique has been implemented. We investigate the positioning performance on open-loop, closed-loop and PSC by experiments. The results of experiments have verified that PSC is an available way to maintain travel range and reduce the cost for precise position sensing while without so much sacrifice on positioning accuracy comparing with closed-loop control in all-axis for the stage.