Control composition study of sputtered NiTi shape memory alloy film

Composition control of r.f.-sputtered Ti50Ni40Cu10 thin films using optical emission spectroscopy

“…The scanning step is 0.07 nm. The peaks are chosen according to the study of Bendahan et al [6,7] and the `MIT Wavelength Tables' [8]. To prevent the loss of optical transmittance resulted from the deposition of Ti, Ni and Cu atoms on the quartz window, a clean quartz window is used after each scanning.…”

Characterisation and properties of magnetron sputtered nanoscale bi‐layered Ni/Ti thin films and effect of annealing

“…[2][3][4][5] There are various interesting features which are present in shape memory Ni-Ti alloy thin films such as, sustainability at high stress (500 MPa) without permanent deformation, working at low operating voltage, biocompatibility, high passive, and active damping capacity which facilitates the realization of micro-actuators. [6] The memory properties of thin film differ from bulk alloys because of smaller grain size, related surface effects, and plane stress conditions of the former. [7] The transformation temperature and recoverable strain are the two crucial factors which vary with minute changes in composition and thermal treatment.…”

“…Ni–Ti based thin films are excellent candidates for nano‐electro‐mechanical‐system (NEMS) applications . There are various interesting features which are present in shape memory Ni–Ti alloy thin films such as, sustainability at high stress (500 MPa) without permanent deformation, working at low operating voltage, biocompatibility, high passive, and active damping capacity which facilitates the realization of micro‐actuators . The memory properties of thin film differ from bulk alloys because of smaller grain size, related surface effects, and plane stress conditions of the former .…”

Recent development of TiNi-based shape memory alloys in Taiwan

“…Among the several types of high performance materials, TiNi thin films are excellent candidates in fabricating micro-actuators. Hence, efforts have been made to fabricate TiNi thin films using many different coating techniques [43][44][45][46][47][48][49][50][51][52][53][54][55][56][57][58][59].…”