2010
DOI: 10.1002/tee.20624
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Control and monitoring of the quartz crystal current in the quartz crystal oscillator

Abstract: Novel circuit design is proposed for low-frequency quartz crystal oscillator circuit with the enhanced control of excitation level. The function of the limiter circuit was analyzed on the base of the negative resistance of the CMOS-inverter quartz oscillator reviewed for the fundamental mode of a quartz crystal microbalance resonator, and appropriate gain control and drive current reduction were realized by adding a capacitor between one terminal of the quartz crystal and the ground level. Experimental result … Show more

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Cited by 3 publications
(3 citation statements)
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“…At present, film thickness control is mainly divided into quartz crystal monitoring and optical monitoring [ 27 ]. Quartz crystal monitoring measures the physical thickness of the film by monitoring the changes in the vibration frequency of the AT-cut quartz crystal [ 28 ]. The signal changes linearly, and it is easy to monitor the deposition rate.…”
Section: Thin Film Preparation and Analysismentioning
confidence: 99%
“…At present, film thickness control is mainly divided into quartz crystal monitoring and optical monitoring [ 27 ]. Quartz crystal monitoring measures the physical thickness of the film by monitoring the changes in the vibration frequency of the AT-cut quartz crystal [ 28 ]. The signal changes linearly, and it is easy to monitor the deposition rate.…”
Section: Thin Film Preparation and Analysismentioning
confidence: 99%
“…Especially for highly sensitive film layers, a small error may have a serious impact. Therefore, timely switching of the crystal control chip is required [19]. The optical monitoring method measures the optical thickness of the film and has a compensation mechanism for the film thickness error.…”
Section: Analysis Of Quartz Crystal and Optical Control Solutionsmentioning
confidence: 99%
“…A crystal control method is used to monitor the physical thickness of the film by monitoring the amount of vibration frequency change of the AT-cut quartz crystal. The monitoring signal is linear, and it can detect the film deposition rate in real time [27]. The use of the optical control method allows for obtaining the optical thickness of the film by inversion of the light intensity At present, there are mainly three kinds of film thickness control: time control, crystal control method, and optical control method [25].…”
Section: Analysis Of Optical Control Solutionsmentioning
confidence: 99%