Continuous-wave operation of phase-coupled vertical-cavity surface-emitting laser arrays

Sopra, Fabrice Monti di; Brunner, M.; Gauggel, H.-P.; Zappe, Hans; Moser, M.; Hövel, R.; Kapon, E.

doi:10.1063/1.1316772

Cited by 37 publications

(9 citation statements)

References 8 publications

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“…In the following years, reflectivity-modulated VCSEL arrays were fabricated using either patterned metal on the (unetched) DBR mirror surface (Catchmark et al, 1996;Monti di Sopra et al, 2000;Morgan et al, 1992Orenstein et al, 1991Orenstein et al, , 1992 or etched features in the DBR mirror (Gourley et al, 1991;Warren et al, 1992). In the work of Orenstein et al (1991Orenstein et al ( , 1992, a substrate-emitting configuration was utilized.…”

Section: Reflectivity-modulated Vcsel Arraysmentioning

confidence: 99%

“…In the work of Orenstein et al (1991Orenstein et al ( , 1992, a substrate-emitting configuration was utilized. Morgan et al, 1992, Catchmark et al (1996), and Monti di Sopra et al (2000) were similarly able to attain coherent coupling by liftoff patterning a metal grid on the DBR for a top-emitting design as sketched in Fig. A layer of a lower reflectivity metal alloy was deposited to influence the reflectivity modulation depth and create an electrical contact.…”

Section: Reflectivity-modulated Vcsel Arraysmentioning

confidence: 99%

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Coherent Coupling of Vertical-Cavity Surface-Emitting Laser Arrays

Siriani

Choquette

2012

Advances in Semiconductor Lasers

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Section: Reflectivity-modulated Vcsel Arraysmentioning

confidence: 99%

Section: Reflectivity-modulated Vcsel Arraysmentioning

confidence: 99%

Coherent Coupling of Vertical-Cavity Surface-Emitting Laser Arrays

Siriani

Choquette

2012

Advances in Semiconductor Lasers

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“…Recent progress with VCSEL arrays has demonstrated their potential for increased-power, low-diffraction, single-mode laser sources and electrically controllable laser steering in two dimensions [4,5]. These laser arrays have been shown to couple via both evanescent [6][7][8] and leaky [9,10] fields. The focus of this work is the former coupling mechanism.…”

Section: Introductionmentioning

confidence: 99%

Stochastic coupled mode theory for partially coherent laser arrays

2010

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Partially coherent, transversely coupled laser arrays are investigated within a stochastic coupled mode formalism. Predictions of the coherence or correlation functions in both the spectral and time domains are made. It is demonstrated that the coherence properties of the system in both domains are strongly dependent on the number and intensity of coupled modes. The theory can be useful for the study of semiconductor laser arrays, particularly vertical-cavity surface-emitting laser arrays.

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“…Because of the optical loss between evanescently coupled VCSELs, a phase shift of 180 is typically observed between neighboring lasers [1]. Previous work with implanted VCSEL arrays specifically included elements of optical loss such as an air gap [2] or metal [3]- [7] between lasers. These geometries create an out-of-phase array mode with an on-axis null in the far-field which is undesirable for most applications.…”

Section: Index Terms-coherent Arrays Vertical-cavity Surface-emittinmentioning

confidence: 99%

One- and Two-Dimensional Coherently Coupled Implant-Defined Vertical-Cavity Laser Arrays

Lehman¹,

Choquette²

2007

IEEE Photon. Technol. Lett.

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Abstract-Loss between elements of coherently coupled vertical-cavity surface-emitting laser (VCSEL) arrays typically causes out-of-phase operation with on-axis intensity nulls in the far-field. We show that in-phase evanescently coupled VCSEL arrays may be defined by proton implantation. An advantage for implanted in-phase coherently coupled VCSEL arrays is that this approach employs a simple and reliable fabrication process where the absence of loss between elements leads to in-phase coupling. We present data for 2, 3, and 4 element in-phase implant-defined coherently coupled VCSEL arrays. Index Terms-Coherent arrays, vertical-cavity surface-emitting laser (VCSEL).A RRAYS OF vertical-cavity surface-emitting lasers (VCSELs) have been studied extensively for coherent optical coupling between lasers [1]- [11]. Coherent coupling allows for increased power in the far-field at a single frequency, which may be used in applications such as optical logic, image processing, and beam steering. Because of the optical loss between evanescently coupled VCSELs, a phase shift of 180 is typically observed between neighboring lasers [1]. Previous work with implanted VCSEL arrays specifically included elements of optical loss such as an air gap [2] or metal [3]- [7] between lasers. These geometries create an out-of-phase array mode with an on-axis null in the far-field which is undesirable for most applications. Phase-adjusted arrays [8] and anti-guided VCSELs [9], [10] can bypass or compensate for this mode at the cost of a complicated fabrication process. It is also possible to achieve in-phase coupling with photonic crystal VCSELs, however, the hole(s) between lasers frequently promote the out-of-phase mode [11]-[13].In this work, we show that proton implantation isolation in the top distributed Bragg reflector of VCSELs emitting at nominally 850 nm may be used to define individual elements in the array. The implantation pixelates the gain region without adding optical loss between neighboring lasers. One of the main attractions of these arrays is that there is no additional fabrication complexity to that of a conventional implant-defined VCSEL [14]. The devices studied have 27 top distributed Bragg reflector (DBR) periods, 35 bottom DBR periods, and GaAs quantum wells to provide gain. A cross-sectional sketch of this device is shown in Fig. 1. To begin, a thick resist process is used to define the round, unimplanted regions inside the contact ring of each VCSEL. The energy and dose of the proton-implantation were 340 keV and cm , respectively. The wafer was tilted at 7 from normal during implantation to prevent channeling. Following implantation, a standard VCSEL fabrication process is followed.Data from three array geometries are presented: a 2 1 array with 5.3 m diameter implant apertures at a center to center pitch of 9.3 m, a 3-element array with 6.3 m diameter implant apertures at a pitch of 9.5 m in a triangular arrangement, and a 2 2 array with 5.0 m diameter apertures at a pitch of 9.0 m. These dimensions correspond ...

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Continuous-wave operation of phase-coupled vertical-cavity surface-emitting laser arrays

Cited by 37 publications

References 8 publications

Coherent Coupling of Vertical-Cavity Surface-Emitting Laser Arrays

Coherent Coupling of Vertical-Cavity Surface-Emitting Laser Arrays

Stochastic coupled mode theory for partially coherent laser arrays

One- and Two-Dimensional Coherently Coupled Implant-Defined Vertical-Cavity Laser Arrays

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