Continuous Time Interface for ±1.5 g Closed-Loop Accelerometer

Aaltonen, Lasse; Rahikkala, P.; Saukoski, M.; Halonen, K.

doi:10.1109/icicdt.2007.4299571

Cited by 7 publications

(4 citation statements)

References 2 publications

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“…Because of the greater power signal, low-temperature sensitivity, with simplicity in providing electrostatic force to enable closed-loop control, a capacitive microelectromechanical systems (MEMS) accelerometer is selected as the front-end sensor device [17], [18]. The mechanical transfer function can be calculated using Newton's Second Law (1).…”

Section: Comb Drive and Brownian Noisementioning

confidence: 99%

A sigma-delta interface built-in self-test and calibration for microelectromechanical system accelerometer's utilizing interpolation method

Ahmed

Al-Gayem

2023

IJECE

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This work presents the capacitive micromechanical accelerometer with a completely differential high-order switched capacitor sigma-delta modulator interface. Such modulation interface circuit generates one-bit output data using a third sigma-delta modulator low-noise front-end, doing away with the requirement for a second enhanced converter of resolution to encode the feedback route analog signal. A capacitive micromechanical sensor unit with just a greater quality factor has been specifically employed to give greater resolution. The closed-loop and electrical correction control are used to dampen the high-Q values to get the system's stability with high-order. This microelectromechanical system (MEMS) capacitive accelerometer was calibrated using a lookup table and Akima interpolation to find manufacturing flaws by recalculating voltage levels for the test electrodes. To determine the proper electrode voltages for fault compensation, COMSOL software simulates a number of defects upon that spring as well as the fingers of the sensor system. When it comes time for the feedback phase of a proof mass displacement correction, these values are subsequently placed in the lookup table.

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Section: Comb Drive and Brownian Noisementioning

confidence: 99%

A sigma-delta interface built-in self-test and calibration for microelectromechanical system accelerometer's utilizing interpolation method

Ahmed

Al-Gayem

2023

IJECE

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“…The bandwidth of the amplifier is several times higher than the sampling rate to allow proper settling and thus leads to noise folding [27]. The thermal noise of the amplifier is filtered by the loop and is aliased into the in-band frequency range since the noise is wideband and the output is sampled [29]: (14) where is the sampling frequency. Equation (14) indicates that the amplifier bandwidth does not directly influence the thermal noise.…”

Section: A Amplifier Noisementioning

confidence: 99%

“…The thermal noise of the amplifier is filtered by the loop and is aliased into the in-band frequency range since the noise is wideband and the output is sampled [29]: (14) where is the sampling frequency. Equation (14) indicates that the amplifier bandwidth does not directly influence the thermal noise. Thus the bandwidth should be chosen to satisfy the settling requirements.…”

Section: A Amplifier Noisementioning

confidence: 99%

A Closed-Loop <formula formulatype="inline"> <tex Notation="TeX">$\Sigma\Delta$</tex></formula> Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/<formula formulatype="inline"><tex Notation="TeX">$ \surd$</tex></formula>Hz Input Noise Density

Liu

Yin

2015

IEEE J. Solid-State Circuits

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In this paper, a fully-differential high-order switchedcapacitor (SC) sigma-delta interface in a standard 0.5 m CMOS technology for a micromechanical capacitive accelerometer is presented. A 1 bit digital output is attained by the interface circuit based on a low-noise front-end and a back-end third-order SC modulator, avoiding the use of a separate high-resolution converter to digitize the analog feedback signal. In addition, a micromechanical capacitive sensor element with a high quality factor (high-Q) is used to achieve high-resolution. Furthermore, closed-loop operation and electrical compensation are employed for damping the high-Q to ensure the stability of the high-order system. The sensor consumes 23 mW of power from a single 7 V supply at a sampling clock of 250 kHz. Meanwhile, a sensitivity of 1.896 V/g is achieved with a noise floor of lower than 200 ng Hz in low-frequency. The sensor has a nonlinearity of 0.15% with an input range of 1.2g. The bandwidth (BW) is 300 Hz and the bias instability is 18 g.Index Terms-High quality factor, high-order, interface circuit, micromechanical capacitive accelerometer, sigma-delta modulator. 0018-9200

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“…The system description is followed by short analysis on the required building blocks of the interface and essential stability limiting factors. Additional information about the implementation can be found in [6].…”

Section: Introductionmentioning

confidence: 99%

High resolution analog interface for micromachined capacitive accelerometer

Aaltonen¹,

Rahikkala²,

Saukoski³

et al. 2007

2007 18th European Conference on Circuit Theory and Design

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A continuous time analog accelerometer interface is feasible when high dynamic range together with wide signal band is required. This paper provides design data for a 120 dB accelerometer with signal band of 300 Hz. Circuit structures for an integrated interface will be presented and important sources of instabilities discussed. Measured and simulated results will be provided to support the theory.

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Continuous Time Interface for ±1.5 g Closed-Loop Accelerometer

Cited by 7 publications

References 2 publications

A sigma-delta interface built-in self-test and calibration for microelectromechanical system accelerometer's utilizing interpolation method

A sigma-delta interface built-in self-test and calibration for microelectromechanical system accelerometer's utilizing interpolation method

A Closed-Loop <formula formulatype="inline"> <tex Notation="TeX">$\Sigma\Delta$</tex></formula> Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/<formula formulatype="inline"><tex Notation="TeX">$ \surd$</tex></formula>Hz Input Noise Density

High resolution analog interface for micromachined capacitive accelerometer

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