Continuous cathodic Arc sources

Cathodic Arc Plasma Deposition

“…This feature and a better control of the cathode erosion pattern lead to the development of magnetically "steered arcs" [49,50]. Another observation is that heated cathodes [43] and cathodes of low-melting point material have a high particle erosion rate.…”

Approaches to rid cathodic arc plasmas of macro- and nanoparticles: a review

“…One of them is that magnetically driven cathode spots produce fewer particles, which can be attributed to a shorter interaction time of the plasma with the cathode material at the spot location. This feature and a better control of the cathode erosion pattern lead to the development of magnetically "steered arcs" [23,24]. Another observation is that heated cathodes [25] and cathodes of low-melting point material have a high particle erosion rate.…”

Adhesion improvement of thick DLC coatings produced by cathodic arc evaporation over stainless steel using carbon bombardment step.

“…The movement of the arc spot over the cathode is extremely important, since the ionization is higher for plasmas produced in the explosive phase. Due to this effect, some commercial deposition chambers use steered arcs, which consist of applying a magnetic field in front of the targets to induce a rapid and constant movement of the arc (FALABELLA; KARPOV, 1996). The plasma generated at arc spots is characterized by very high density and temperature, resulting in pressure.…”