Contactless angle measurement by CMOS process with on chip interface circuit

Abstract

Contactless magnetic-sensitive two-&mensional angle detector system can be used in harsh environments when longer operating lifetime and better reliability are required. In a single chip wafer, we have designed and fabricated several kind of detect6r systems to find out the better way with the industrial CMOS process. One kind is based on four Hall devices, the other kind is based on lateral magnetotransistor(LM), and' a new system which take both advantage of two above systems..' Through system test, we have found the favorable features of the above systems.