Construction and experiment on micro-gyroscope detection balance loop

Abstract

In order to overcome the defect of open-loop detection of micro-gyroscope, based on comb capacitance detection of micro-structure, the working principle of electrostatic force suppressing capacitance comb vibration was analyzed. The Coriolis signal vibration amplitude of micro-gyroscope was extracted; with the Coriolis vibration amplitude as the control variable, the detection balance loop of micro-gyroscope was constructed. The experimental result shows that the constructed detection balance loop is able to balance the Coriolis force and suppress the Coriolis vibration. The scale factor linearity and symmetry have greatly enhanced, and the measurement range, the threshold and resolution have improved at some extent.