Constitution, microstructure, and battery performance of magnetron sputtered Li–Co–O thin film cathodes for lithium-ion batteries as a function of the working gas pressure

Ziebert, Carlos; Ketterer, Bernt; Rinke, Monika; Adelhelm, C.; Ulrich, S.; Gahr, K.‐H. Zum; Indris, Sylvio; Schimmel, Th.

doi:10.1016/j.surfcoat.2010.07.110

Cited by 24 publications

(20 citation statements)

References 13 publications

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“…This was done due to the fact that anionic vacancies are rarer than cationic ones. Similar to the sputtered Li 1.1 Mn 1.9 O 4 films, it has already been reported for LiCoO 2 [36] that sputtering at low pressures leads to Li-excess. Sputtering at higher pressures of 10 Pa however, led to lithium deficient Li-Mn-O thin films as was investigated within previous work [37].…”

Section: As-deposited Li-mn-o Thin Filmssupporting

confidence: 81%

Comparative studies of laser annealing technique and furnace annealing by X-ray diffraction and Raman analysis of lithium manganese oxide thin films for lithium-ion batteries

et al. 2013

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Section: As-deposited Li-mn-o Thin Filmssupporting

confidence: 81%

Comparative studies of laser annealing technique and furnace annealing by X-ray diffraction and Raman analysis of lithium manganese oxide thin films for lithium-ion batteries

et al. 2013

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“…A good knowledge of the relationship between the process parameters and the resultant structure of the film is required to obtain the desired properties of the deposit [57,58,59,60,61,62,63,64,65,66,67,68,69,70]. The monitoring of many rf-sputtering parameters, i.e., sputter power, working atmosphere, working pressure, target-substrate distance ( d st ), and deposition temperature ( T s ), allows us to control the texture, orientation and crystallinity of LCO thin films.…”

Section: Influence Of Preparation Conditionsmentioning

confidence: 99%

Sputtered LiCoO2 Cathode Materials for All-Solid-State Thin-Film Lithium Microbatteries

2019

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This review article presents the literature survey on radio frequency (RF)-magnetron sputtered LiCoO2 thin films used as cathode materials in all-solid-state rechargeable lithium microbatteries. As the process parameters lead to a variety of texture and preferential orientation, the influence of the sputtering conditions on the deposition of LiCoO2 thin films are considered. The electrochemical performance is examined as a function of composition of the sputter Ar/O2 gas mixture, gas flow rate, pressure, nature of substrate, substrate temperature, deposition rate, and annealing temperature. The state-of-the-art of lithium microbatteries fabricated by the rf-sputtering method is also reported.

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“…Yazami et al [36] achieved 138 mAh/g capacity for first discharge and discussed the potential reasons for capacity decay. Chiu [37] and Ziebert et al [38] studied thin films of lithium cobalt oxide deposited by magnetron sputter deposition and achieved a maximum capacity of 110 mAh/g and 130 mAh/g respectively. Song et al [39] reported the growth of Co3O4 impurity phase in LiCoO2 thin film after charge discharge studies degrade the cycle life.…”

Section: Electrochemical Studymentioning

confidence: 99%

Investigations On Sputter Deposited LiCoO2 Thin Films From Powder Target

et al. 2013

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LiCoO2 thin films used as cathode layers in thin-film solid-state batteries have been deposited from LiCoO2 powder target using radio frequency (rf) magnetron sputtering in a cost effective approach in terms of material consumption and processing time. Xray diffraction (XRD) studies of the films after post deposition annealing treatment revealed (104) orientation, which is the characteristic of rf sputtered LiCoO2 films. Raman spectroscopy was used to identify the different modes of vibration of atoms in the film. The surface morphology and cross-section of the samples were characterized using field emission scanning electron microscopy (SEM). The chemical analysis of LiCoO2 thin films was examined by X-ray photoelectron spectroscopy (XPS) showed atomic ratio of Li/Co as 0.9 which is close to the ideal value 1. Electrochemical characterization such as chargedischarge and cyclic voltammetry were conducted for LiCoO2 films deposited on platinized silicon substrates in the potential range 3.0 to 4.2 V vs Li/Li +. The maximum discharge capacity of 64 µAh.µm-1. cm-2 and 52 µAh. µm-1 .cm-2 were achieved when discharged at a current of 5 µA and 50 µA for the first discharge cycle respectively. Moreover the electrochemical investigations of LiCoO2 thin films on flexible copper substrates also investigated and achieved an initial discharge capacity of 83 mAh/g. The possible reasons for degradation in the electrochemical properties have been discussed. The present work indicates suitability of sputtering from powder targets for thin film battery fabrication.

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Constitution, microstructure, and battery performance of magnetron sputtered Li–Co–O thin film cathodes for lithium-ion batteries as a function of the working gas pressure

Cited by 24 publications

References 13 publications

Comparative studies of laser annealing technique and furnace annealing by X-ray diffraction and Raman analysis of lithium manganese oxide thin films for lithium-ion batteries

Comparative studies of laser annealing technique and furnace annealing by X-ray diffraction and Raman analysis of lithium manganese oxide thin films for lithium-ion batteries

Sputtered LiCoO2 Cathode Materials for All-Solid-State Thin-Film Lithium Microbatteries

Investigations On Sputter Deposited LiCoO2 Thin Films From Powder Target

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