Consideration of the effect of nanoscale porosity on mass transport phenomena in PECVD coatings
J Franke,
F Zysk,
S Wilski
et al.
Abstract:Here we show a novel approach to characterise the gas transfer behaviour of silicon-oxide (SiOx) coatings and explain the underlying dynamics. For this, we investigate the coating on a nm-scale both by measurement and simulation. Positron Annihilation Spectroscopy (PAS) and quantum mechanical electronic structure-based molecular dynamics simulations are combined to characterise the porous landscape of SiOx coatings. This approach analyses the influence of micropores smaller than 2 nm in diameter on gas permeat… Show more
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