Consideration of existence of phase information of object shape in zeroth-order diffraction beam using electromagnetic simulation with aperture in front of objective

Microshape Measurement Method Using Speckle Interferometry Based on Phase Analysis

“…On the contrary, in terms of the fine structure used in this study, it is believed that it is impossible to obtain the final shape unless filtering is performed. In this study, as described above, processing using filtering technology for noise components in two different frequency bands is performed in two steps [14][15][16]. Therefore, it is possible to observe the fine structure smoothly.…”

“…The principle of this method [14,15] can be validated by comparing its measurement results with those of other techniques, such as atomic force microscopy (AFM), using the grating of the periodic structure as the measurement object. In this case, because the same structure exists everywhere, the same situation of the same measured object can be measured [14][15][16]. However, if only the periodic structure is measured, misunderstandings and misconceptions can emerge if the speckle interference measurement technology is not well understood.…”

Shape Measurement Method of Two-Dimensional Micro-Structures beyond the Diffraction Limit Based on Speckle Interferometry

“…Following this processing concept, specifically, if the difference in the direction between point PA and point PB is detected with high-resolution using a s interferometer [14,21], the amount of change represented by Equation ( 1) can be obt Furthermore, because the amount of shift δx in the horizontal direction is know differential coefficient of the shape shown in Figure 1a can be calculated using Eq (2). Finally, by integrating this differential coefficient value in the x-direction, the f(x) of the measured object can be obtained.…”

“…Following this processing concept, specifically, if the difference in the height direction between point P A and point P B is detected with high-resolution using a speckle interferometer [14,21], the amount of change represented by Equation (1) can be obtained.…”

“…The system is easy to use in a room because it is constructed with a honeycomb based on an active vibration isolation table (SAT-56: Showa Science Active vibration isolation table ). Using this optical system, the shape of the measured object is detected during the analysis process shown in Figure 3, based on the principle shown in Figure 1, through a multilayered combination of several analysis techniques for speckle developed by the authors to date [13,14,20,21]. The details of each speckle analysis technique are not described here; however, they are referred to in the references.…”