Consideration of diamond film growth on various orientation substrates of diamond in oxygen and hydrogen atmospheres by reactive pulsed laser deposition

Hara, T.; Yoshitake, Tsuyoshi; Fukugawa, Tomohito; Zhu, Ling yun; Itakura, Masaru; Kuwano, Noriyuki; Tomokiyo, Yoshitsugu; Nagayama, Kazuaki

doi:10.1016/j.diamond.2003.10.078

Cited by 7 publications

(5 citation statements)

References 9 publications

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“…The chemisorbed hydrogen or fluorine species upholds the sp 3 hybridization of the topmost carbon radicals and, thus, protects the surface from becoming reconstructed or sp 2 -hybridized (i.e., graphitized). The chemisorption of oxygen has also been shown to yield better film quality and growth rates due to the removal of sp 2 -hybridized carbon by CO desorption. , …”

Section: Introductionmentioning

confidence: 99%

“…The chemisorption of oxygen has also been shown to yield better film quality and growth rates due to the removal of sp 2 -hybridized carbon by CO desorption. 18,19 Reactivity studies of nonterminated diamond surfaces by using theoretical methods have the potential of predicting and explaining experimental results regarding, e.g., growth mechanisms and surface functionalization. The dominating surface planes obtained during vapor-phase deposition of diamond are the low-index (111), (100), and (110) planes, which thereby are the most interesting ones when studying the reaction tendency for diamond surfaces.…”

Section: Introductionmentioning

confidence: 99%

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Origin of the Reactivity on the Nonterminated (100), (110), and (111) Diamond Surfaces: An Electronic Structure DFT Study

Petrini

Larsson

2008

J. Phys. Chem. C

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The reactivity of nonterminated diamond low-index surfaces has been evaluated using density functional theory (DFT). The intrinsic electronic structures of the topmost carbon atoms of diamond (100)−1 × 1, (100)−2 × 1, (110)−1 × 1, (111)−1 × 1, and (111)−2 × 1 surfaces have been calculated and analyzed using highly accurate numerical basis set first-principle techniques. The following reactivity indicators have been utilized: Fukui functions, electrostatic potential, and Kohn−Sham orbitals (highest occupied and lowest unoccupied). Their spatial representations have been mapped onto a charge density isosurface whereby plausible reactive sites were identified and related. Specifically, the change in chemically reactivity induced by a 1 × 1 to 2 × 1 surface reconstruction has been discussed. In addition, density of states and the deformation density of the topmost carbon atoms have been included. Most often the sites of electrophilically susceptible areas correspond to the mapping of f − function, electrostatic potential, and highest occupied molecular orbital. Conversely, nucleophilic sites correspond to the f+-function and the lowest unoccupied molecular orbital. However, some discrepancies are found, and it seems that the Fukui functions yield more accurate results due to orbital relaxation effects taken into account. The results herein were furthermore compared to adsorption studies of H-, O-, and OH-terminated diamond (100) and (111) surfaces, respectively. It was concluded that the reactivity of diamond surfaces can be evaluated by using DFT techniques, which will thereby make it possible to increase the knowledge about thin film growth mechanisms, surface functionalization, and reconstructions.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Origin of the Reactivity on the Nonterminated (100), (110), and (111) Diamond Surfaces: An Electronic Structure DFT Study

Petrini

Larsson

2008

J. Phys. Chem. C

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“…An oxygen atmosphere has proved to be quite as efficient to increase the diamond fraction in the deposited film, though following a different mechanism [99][100][101][102][103][104][105].…”

Section: Type and Pressure Of Background Gasmentioning

confidence: 99%

“…Other reactive gases have also been used, such as hydrogen-containing gases (e.g., C 2 H 2 [106], CH 4 [95,107]) and nitrogen [96][97][98][99][100][101][102][103][104][105][106][107][108][109][110][111][112]. Like molecular hydrogen itself, these gases can only interact with the growing films after dissociation; therefore, a careful optimization of their pressure is required to avoid too drastic a reduction of the kinetic energy of C ions.…”

Section: Type and Pressure Of Background Gasmentioning

confidence: 99%

Pulsed Laser Deposition of Carbon-Based Materials: A Focused Review of Methods and Results

Gaudiuso

2023

Processes

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Pulsed Laser Deposition (PLD) is a highly flexible experimental methodology for the growth of thin films of a broad variety of materials, based on the generation of laser-induced plasmas (LIP) with material ablated from a solid target and on the transfer of the ablated material to a substrate. This review is focused on carbon-based materials—specifically, diamond-like carbon (DLC), graphene and carbyne—and will both discuss the influence of the most critical experimental parameters on the obtained materials and present the experimental developments proposed in the recent literature to tailor the properties of the deposited films and optimize the standard PLD technique for production of various carbon-based materials.

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“…During CVD growth, atomic hydrogen is considered to play an important role in diamond nucleation and growth through differential etching and bond stabilization at the grown film surface. On the other hand, a hydrogen environment generates nonoriented diamond nanocrystallites presenting maximum diameters of 20 nm [109]. Investigations of ambient gas effects during the homoepitaxial growth of diamond by PLD show that epitaxial diamond thin films exhibiting 0.5 to 1 mm grain diameters grow in an optimized oxygen atmosphere.…”

Section: Diamond and Related Carbon Materialsmentioning

confidence: 99%

Pulsed Laser Deposition (PLD)

Fujioka

2015

Handbook of Crystal Growth

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Consideration of diamond film growth on various orientation substrates of diamond in oxygen and hydrogen atmospheres by reactive pulsed laser deposition

Cited by 7 publications

References 9 publications

Origin of the Reactivity on the Nonterminated (100), (110), and (111) Diamond Surfaces: An Electronic Structure DFT Study

Origin of the Reactivity on the Nonterminated (100), (110), and (111) Diamond Surfaces: An Electronic Structure DFT Study

Pulsed Laser Deposition of Carbon-Based Materials: A Focused Review of Methods and Results

Pulsed Laser Deposition (PLD)

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