Conformal metal thin-film coatings in high-aspect-ratio trenches using a self-sputtered rf-driven plasma source

L, Ji; Kim, J.-K.; Ji, Qing; Leung, K. N.; Chen, Y.; Gough, Rick A.

doi:10.1116/1.2749527

Cited by 10 publications

(4 citation statements)

References 8 publications

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“…We observe that both the metasurface and fluoropolymer coatings cover the micropillared substrate uniformly, making them almost indistinguishable from the bare pillars. Especially for the metasurface coating, we used low-pressure and high-power sputtering to promote deposition directionality (see Methods for deposition conditions), which ensures coverage of the bottom of the texture, and also to enhance conformality through metal ion resputtering on the sidewalls of the micropillars . Some submicrometer features on the surface are due to the soft lithography replication process but do not negatively impact its performance.…”

Section: Results and Discussionmentioning

confidence: 76%

“…Especially for the metasurface coating, we used low-pressure and high-power sputtering to promote deposition directionality (see Methods for deposition conditions), which ensures coverage of the bottom of the texture, and also to enhance conformality through metal ion resputtering on the sidewalls of the micropillars. 54 Some submicrometer features on the surface are due to the soft lithography replication process but do not negatively impact its performance. (For more information on the superhydrophobic control surface, see Supporting Information, section "Topography of the control", and Figure S1.)…”

Section: Resultsmentioning

confidence: 99%

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Transparent Photothermal Metasurfaces Amplifying Superhydrophobicity by Absorbing Sunlight

et al. 2020

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Imparting and maintaining surface superhydrophobicity is receiving significant research attention over the last several years, driven by a broad range of important applications and enabled by advancements in materials and surface nanoengineering. Researchers have investigated the effect of temperature on droplet-surface interactions, which poses additional challenges when liquid nucleation manifests itself, due to ensuing condensation into the surface texture that compromises its anti-wetting behavior. Maintaining surface transparency at the same time poses an additional and significant challenge. Often, the solutions proposed are limited by working temperatures or are detrimental to visibility through the surface. Here we introduce a scalable method employing plasmonic photothermal metasurface composites, able to harvest sunlight and naturally heat the surface, sustaining water repellency and transparency under challenging environmental conditions where condensation and fogging would otherwise be strongly promoted. We demonstrate that these surfaces, when illuminated by sunlight, can prevent impalement of impacting water droplets, even when the droplet to surface temperature difference is 50°C, by suppressing condensate formation within the texture, maintaining transparency. We also show how the same transparent metasurface coating could be combined and work collaboratively with hierarchical micro-and nanorough textures, resulting in simultaneous superior pressure-driven impalement resistance and avoidance of water nucleation and related possible frosting in supercooled conditions. Our work can find a host of applications as a sustainable solution against impacting water on surfaces such as windows, eyewear, and optical components.

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Section: Results and Discussionmentioning

confidence: 76%

Section: Resultsmentioning

confidence: 99%

Transparent Photothermal Metasurfaces Amplifying Superhydrophobicity by Absorbing Sunlight

et al. 2020

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“…The Au/Pd does not coat the entire depth of the trench sidewalls since sputtering processes tend to be nonconformal in high-aspect-ratio features. [37] Upon contact of the two gold layers, the contacting area, which is necessary for charge conduction, is small.…”

Section: Integration Of P4vp Into Trenchesmentioning

confidence: 99%

Synthesis of Poly(4‐vinylpyridine) Thin Films by Initiated Chemical Vapor Deposition (iCVD) for Selective Nanotrench‐Based Sensing of Nitroaromatics

Tenhaeff

McIntosh

Gleason

2010

Adv Funct Materials

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A new nanoscale sensing concept for the detection of nitroaromatic explosives is described. The design consists of nitroaromatic‐selective polymeric layers deposited inside microfabricated trenches. As the layers are exposed to nitroaromatic vapors, they swell and contact each other to close an electrical circuit. The nitroaromatic selective polymer, poly(4‐vinylpyridine) (P4VP), is deposited in the trenches using initiated chemical vapor deposition (iCVD). P4VP is characterized for the first time as a selective layer for the absorption of nitroaromatic vapors. The Flory–Huggins equation is used to model the swelling response to nitroaromatic vapors. The Flory–Huggins interaction parameter for the P4VP–nitrobenzene system at 40 °C is 0.71 and 0.25 for P4VP–4‐nitrotoluene at 60 °C. Sensing of nitrobenzene vapors is demonstrated in a prototype device, while techniques to improve the performance of the design in terms of response time and sensitivities are described. Modeling shows that concentration and mass limits of detection of 0.95 ppb and 3 fg, respectively, can be achieved.

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“…To extend the applicability of PVD to the next generations of IC manufacturing, there exist several technical methods of reducing the shadowing effect. [2][3][4] The formation of overhang occurs when the deposited atoms accumulate on the top opening of the trench. To reduce the formation of the overhang by improving the mobilities of adatoms over a substrate with a certain packed structure can be effective.…”

Section: Introductionmentioning

confidence: 99%

Molecular Dynamics Study on Enhanced Cu Coverage of Trench Filling with Low-Index Ta Surfaces

Hong

Yang

2012

Jpn. J. Appl. Phys.

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The Cu coverage of trench filling enhanced by different low-index surfaces of tantalum in physical vapor deposition is studied by molecular dynamics simulation with the embedded atom method (EAM) as the interaction potential for the present alloy metal system. The deposition morphologies and bottom step coverage enhancement of trenches with three different aspect ratios are examined. It is found that the Cu adatom on Ta(110) with uniform and low surface diffusion barrier energy and that on Ta(111) with high surface energy lead to the improvement of the surface diffusion of Cu adatoms. The shadowing effect is inhibited on Ta(110) and Ta(111) such that the bottom step coverage of the trench is enhanced markedly at an early stage and the final coverage of trench filling is improved significantly. Also, the texture of deposition on the trench with Ta(110) has a uniform structure owing to the low surface energy, while that with Ta(111) has a nonuniform structure owing to the high surface energy on the sidewall.

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Conformal metal thin-film coatings in high-aspect-ratio trenches using a self-sputtered rf-driven plasma source

Cited by 10 publications

References 8 publications

Transparent Photothermal Metasurfaces Amplifying Superhydrophobicity by Absorbing Sunlight

Transparent Photothermal Metasurfaces Amplifying Superhydrophobicity by Absorbing Sunlight

Synthesis of Poly(4‐vinylpyridine) Thin Films by Initiated Chemical Vapor Deposition (iCVD) for Selective Nanotrench‐Based Sensing of Nitroaromatics

Molecular Dynamics Study on Enhanced Cu Coverage of Trench Filling with Low-Index Ta Surfaces

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