2008
DOI: 10.1017/s1551929500059770
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Confocal Micro X-Ray Fluorescence: A New Paradigm in Materials Characterization

Abstract: Micro x-ray fluorescence (MXRF) is a microscopic analysis and imaging technique that is used to characterize the elements in a material non-destructively. Micro XRF instruments use an x-ray source to shine x-rays on a sample, and a detector to detect the characteristic x-rays given off. These fluorescent x-rays have very specific energies corresponding to specific electron energy transitions. Therefore, it is possible to detect and identify all of the elements present in a sample (typically above sodium) as we… Show more

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Cited by 5 publications
(13 citation statements)
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“…Benefits of this technique include high sensitivity, low background, data collection at each point, moderate to high spatial resolution and non‐destructive to the sample. Some of the drawbacks include low signal counts (for this particular instrument design) leading to long acquisition times, decreasing signal due to absorption of the signal with increasing depth and artifacts in the signal due to instrument geometry . As seen from the data presented here, this technique can generate 1D line scans, 2D contour plots, as well as full 3D maps of density variations.…”
Section: Discussionmentioning
confidence: 99%
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“…Benefits of this technique include high sensitivity, low background, data collection at each point, moderate to high spatial resolution and non‐destructive to the sample. Some of the drawbacks include low signal counts (for this particular instrument design) leading to long acquisition times, decreasing signal due to absorption of the signal with increasing depth and artifacts in the signal due to instrument geometry . As seen from the data presented here, this technique can generate 1D line scans, 2D contour plots, as well as full 3D maps of density variations.…”
Section: Discussionmentioning
confidence: 99%
“…All measurements were conducted with a custom‐built, bench‐top confocal X‐ray fluorescence instrument (Fig. ).…”
Section: Methodsmentioning
confidence: 99%
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