Confinement of acoustic fields in a honeycomb phononic crystal slab

Otsuka, Paul H.; Danworaphong, Sorasak; Veres, István A.; Wright, Oliver B.; Chinbe, R.; Tomoda, Motonobu; Tanaka, Yukihiro; Kim, Sihan H.; Matsuda, Osamu; Jeon, Heonsu

doi:10.1109/iceast.2019.8802519

Cited by 1 publication

(2 citation statements)

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“…Therefore, the utilization of the PnC slabs can efficiently attenuate the energy leaked via the anchors and restrict the mechanical vibration in the resonant body, which contributes to the improvement of the electrical performance of the resonator. The mechanical properties of the material, the geometrical size and the filling fraction all influence the existence and distribution of the phononic bandgap [ 25 , 26 , 27 ]. The pillar-based structure is essential to generate locally-resonant bandgaps by the coupling of flexural and torsional modes.…”

Section: Design Of the Phononic Crystal Anchorsmentioning

confidence: 99%

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Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal

Tong

Han

2021

Micromachines

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Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pillar-based PnC slab with broad bandgaps in the ultra high frequency (UHF) range. Due to Bragg interference and local resonances, the proposed PnC structure creates notably wide bandgaps and shows great advantages in the high frequency, large electromechanical coupling coefficient (k2) thin film aluminum nitride (AlN) lamb wave resonator (LWR). The dispersion relations and the transmission loss of the PnC structure are presented. To optimize the bandgap, the influence of the material mechanical properties, lattice type, pillar height and pillar radius are explored. These parameters are also available to adjust the center frequency of the bandgap to meet the desirable operating frequency. Resonators with uniform beam anchors and PnC slab anchors are characterized. The results illustrate that the Q of the resonator improves from 1551 to 2384, and the mechanical energy leakage via the anchors is significantly decreased using the proposed PnC slab anchors. Moreover, employment of the PNC slab anchors has little influence on resonant frequency and induces no spurious modes. Pillar-based PnCs are promising in suppressing the anchor loss and further improving the Q of the resonators.

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Section: Design Of the Phononic Crystal Anchorsmentioning

confidence: 99%

“…Lattice types have strong influences on the acoustic bandgap [ 26 , 31 , 32 ]. Square lattice, hexagonal lattice and honeycomb lattice are frequently accepted as the shapes of the primitive cell.…”

Section: Design Of the Phononic Crystal Anchorsmentioning

confidence: 99%

Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal

Tong

Han

2021

Micromachines

View full text Add to dashboard Cite

show abstract

Confinement of acoustic fields in a honeycomb phononic crystal slab

Cited by 1 publication

References 4 publications

Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal

Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal

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