Condition assessment and predictive maintenance for contact probe using health index and encoder‐decoder LSTM model
Shun‐Sun Luk,
Yanwen Jin,
Xiaoge Zhang
et al.
Abstract:Contact probe is broadly used for the continuous monitoring of microelectronic components in manufacturing industries. False rejection of fine product due to defective contact probe significantly reduces the yield in production. Traditionally, defect detection for contact probes heavily depends on a valid range manually defined by engineers over the measured value of certain parameters. However, the subjective range defined according to engineer experience is prone to trigger a high rate of false alarms due to… Show more
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