We present quantum Monte Carlo calculations for various reaction pathways of H2 with Si(001), using large model clusters of the surface. We obtain reaction energies and energy barriers noticeably higher than those from approximate exchange-correlation functionals. In improvement over previous studies, our adsorption barriers closely agree with experimental data. For desorption, the calculations give barriers for conventional pathways in excess of the presently accepted experimental value, and pinpoint the role of coverage effects and desorption from steps.The dissociative adsorption of molecular hydrogen on the Si(001) surface has become a paradigm in the study of adsorption systems. Despite its apparent simplicity, more than a decade of extensive experimental and theoretical investigations have not clarified fundamental aspects of the chemical reaction of H 2 with this surface.Many of the experimental observations are hard to reconcile in a unified picture: the sticking probability for dissociative adsorption of H 2 on the clean surface is very small at room temperature suggesting a high adsorption barrier; sticking increases dramatically with higher surface temperatures [1]. On the other hand, the nearly thermally distributed kinetic energy of desorbing molecules has lead researchers to the conclusion that the molecules have transversed almost no adsorption barrier [2]. Microscopically, these observations were originally interpreted in terms of an intra-dimer mechanism, where the hydrogen molecule interacts with one single dimer of the Si(001) surface [3]. However, very recent experiments have pointed to additional mechanisms involving not just a single dimer but nearby dimers [4,5]. The existence of highly reactive pathways was first demonstrated on steps [6] or H-precovered surfaces [7], and evidence that H 2 reacts with two adjacent dimers has also now been given for the clean surface [8]. In Fig. 1, the intra-dimer (H2*) and two inter-dimer pathways at different coverages (H2 and H4) are schematically shown.Theoretically, density-functional theory (DFT) calculations performed on intra-dimer and inter-dimer mechanisms have lead to limited agreement with experiments. While correctly predicting the existence of a barrier-less H4 inter-dimer reaction path at high coverages [9], previous DFT slab calculations yielded an adsorption barrier for the low-coverage H2* and H2 pathways too low to explain the small sticking coefficient observed at low temperatures [7]. Desorption barriers from DFT obtained within the generalized gradient approximation (GGA) were also generally lower than the experimental value (2.5 eV, Ref.[10]). Additional evidence for a possible inadequacy of DFT-GGA to describe this reaction comes from comparison with highly correlated quantum chemistry calculations for small cluster models of the surface: For the intra-dimer pathway, these methods obtain values for the desorption barrier that are at large variance with the DFT-GGA value [11][12][13]. In this Letter, we use quantum Monte Carlo (QMC)...