“…1 Laboratory of Intelligent Machines, Department of Mechanical Engineering, School of Energy Systems, Lappeenranta University of Technology, Lappeenranta, Finland Among candidate transduction mechanisms for MEMS-based robots, including electrostatic (Contreras et al, 2017), electrothermal (Klotz et al, 2019), and shape-memory alloy (Takato et al, 2017) among others, piezoelectric materials offer benefits like high actuation speeds with small power consumption. Thinfilm lead-zirconate-titanate (PZT), Figure 1, offers a promising solution for micro-robotic actuations tasks (Figure 2(a) and (b)), with advantages of having high work density per unit area and reasonable efficiency as a small capacitive load (Oldham et al, 2007;Pulskamp, 2012).…”