Concept for Manufacturing a Microoptoelectromechanical Micro-G Accelerometer

Barbin, Evgenij S.; Nesterenko, Tamara G.; Koleda, Aleksej N.; Shesterikov, E. V.; Kulinich, Ivan V.; Kokolov, A. A.

doi:10.1109/sibcon56144.2022.10002971

2022 International Siberian Conference on Control and Communications (SIBCON) 2022

DOI: 10.1109/sibcon56144.2022.10002971

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Concept for Manufacturing a Microoptoelectromechanical Micro-G Accelerometer

Evgenij S. Barbin

Tamara G. Nesterenko

Aleksej N. Koleda

et al.

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Concept for Manufacturing a Microoptoelectromechanical Micro-G Accelerometer

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References 18 publications

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