2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics 2009
DOI: 10.1109/omems.2009.5338624
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Concentration measurement for sub-μliter solution using a cantilever sensor with an on-tip integrated micro spherical reflecting mirror

Abstract: A cantilever sensor integrated with an on-tip micro spherical reflecting mirror (MSRM) exhibits a larger optical beam displacement than a conventional one, i.e. the system sensitivity/responsivity is enhanced. In this paper, it is employed as a concentration gauge that only requires 0.5 μL of solution. The MSRM-integrated cantilever is first set above a sodium chloride-water droplet carried by a glass substrate, and then the droplet is moved up gradually. Once the cantilever is touched by the droplet, it is pu… Show more

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