2007
DOI: 10.1016/j.optlastec.2005.08.011
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Computer simulation of Fresnel diffraction from rectangular apertures and obstacles using the Fresnel integrals approach

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Cited by 32 publications
(24 citation statements)
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“…The instruction file also includes the ability to specify "tap" files to write out intermediate data values. The simulation results were validated by comparison with rectangular aperture results documented by Abedin [21].…”
Section: Simulation Codementioning
confidence: 99%
“…The instruction file also includes the ability to specify "tap" files to write out intermediate data values. The simulation results were validated by comparison with rectangular aperture results documented by Abedin [21].…”
Section: Simulation Codementioning
confidence: 99%
“…21 Plane wave of 365 nm wavelength is exposed to a mask with two adjacent 10 m holes separated by 50 m, and then, a light intensity profile was calculated 1 mm away from the mask.…”
Section: B Diffraction Pattern Simulationmentioning
confidence: 99%
“…In previous work, [5][6][7][8] we introduced new technique to simulate the diffraction field of apertures having rectangular shapes. This technique is called the Iterative Fresnel Integral Method (IFIM).…”
Section: Introductionmentioning
confidence: 99%