Computer modelling of electronegative plasma sheaths and their mutual interaction

Abstract

Our paper focuses on investigation of sheath structures formed in the vicinity of biased solid objects immersed in electronegative plasma. In Particular, phenomena during mutual interaction of several plasma sheaths were investigated. Our results show the manner in which the sheath of a cylindrical probe is affected by the presence of another cylindrical probe with smaller radius in its surroundings. Number density of charged particles, electric field intensity and fluxes of charged particles on the probes were observed to quantify the mutual interaction of sheaths. The study was done by means of the 2D particle-in-cell model with Monte Carlo treatment of collisions.