2008
DOI: 10.1117/12.797816
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Computer generated holograms: fabrication and application for precision optical testing

Abstract: An overview of recent results in fabrication and application of new types of high precision CGHs for interferometric aspherical testing is presented.

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Cited by 10 publications
(6 citation statements)
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“…Among all the fabrication errors, the substrate error is dominant and is typically of low spatial frequency. Substrate error usual means substrate surface variation from its ideal shape and can be measured by using a testing beam or a collimated beam [5]. Usually method is to subtract the non-zero order surface measurement from the zero order measurement, and the CGH substrate error can be correctly removed [9], [11].…”
Section: A the Calibration Of The Cgh Substrate Twementioning
confidence: 99%
See 1 more Smart Citation
“…Among all the fabrication errors, the substrate error is dominant and is typically of low spatial frequency. Substrate error usual means substrate surface variation from its ideal shape and can be measured by using a testing beam or a collimated beam [5]. Usually method is to subtract the non-zero order surface measurement from the zero order measurement, and the CGH substrate error can be correctly removed [9], [11].…”
Section: A the Calibration Of The Cgh Substrate Twementioning
confidence: 99%
“…With the aid of alignment hologram, the location of CGH can be well aligned. CGH can be manufactured by e-beam writing or laser direct writing with high-precision and high-resolution [5], but there are some unkown factors during the fabrication process. In this paper, we focus on the CGH substrate TWE, which is dominant in the cylindrical wavefront.…”
Section: Introductionmentioning
confidence: 99%
“…The measurement methods suited for this purpose can be divided into two categories: pointwise and areal. The pointwise methods can be further separated into those using tactile probes [4] and optical point sensors [5], whereas areal methods are typically used by interferometric [6,7] or deflectometric [8,9] measurement systems. Pointwise methods are highly adaptable since they are often not subject to any fundamental limitations with respect to the surface forms they can measure.…”
Section: Introductionmentioning
confidence: 99%
“…JSC LZOS has been using Computer Generated Holograms (CGH) [1][2][3] for testing of surfaces of largedimensioned optical components for astronomical and space application for many years. They are applied in the process of testing of aspherical surface figure, testing of off-axis aspherical surfaces with fixing of off-axis parameters and mirror orientation, testing of aspherical surface vertex position with respect to the mirror geometrical center, mutual alignment of mirrors in test scheme, etc.…”
Section: Introductionmentioning
confidence: 99%