2012
DOI: 10.1016/j.vacuum.2011.04.005
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Computational study of sheath structure for plasma-assisted technologies in the presence of electronegative plasma

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2012
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Cited by 5 publications
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“…It was shown that this technique is capable of providing detailed information about plasma behaviour near solids (e.g. 1 ). The studied problem is an analysis of interacting sheaths around two solids immersed in lowtemperature plasma in the positive column of a glow discharge.…”
mentioning
confidence: 99%
“…It was shown that this technique is capable of providing detailed information about plasma behaviour near solids (e.g. 1 ). The studied problem is an analysis of interacting sheaths around two solids immersed in lowtemperature plasma in the positive column of a glow discharge.…”
mentioning
confidence: 99%