2015
DOI: 10.1016/j.vacuum.2015.03.012
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Computational fluid dynamics simulation study of gas flow in dry scroll vacuum pump

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Cited by 29 publications
(9 citation statements)
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“…Yue et al simulated the working process of single-stage and two-stage scroll vacuum pumps, respectively. Additionally, they found that compression and overcompression would lead to significant gas pressure variation and violent compression torque pulsation [22,23]. Wang et al optimized the profile of the asynchronous suction Additionally, an optimization scheme was conceived to improve the cavitation phenomenon and working performance of the pump [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…Yue et al simulated the working process of single-stage and two-stage scroll vacuum pumps, respectively. Additionally, they found that compression and overcompression would lead to significant gas pressure variation and violent compression torque pulsation [22,23]. Wang et al optimized the profile of the asynchronous suction Additionally, an optimization scheme was conceived to improve the cavitation phenomenon and working performance of the pump [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…set up a simulation model under different working conditions, namely under compression, slightly over compression, and over compression, and the result demonstrate the pressure change process inside the pump. 8 A screw grinding process based on computer numeric controlled machine tool was proposed by Zhao et al., 9 in which the screw rotor profile errors can be controlled within ±10 μm. A variable cross-section profile is put forward by Wang et al.…”
Section: Introductionmentioning
confidence: 99%
“…Yue et al [5] established the transient model of the scroll vacuum pump on the basis of dynamic mesh technology with the fluent code; three cases including under-compression, slight over-compression and over-compression were calculated and compared with the experimental results; the maximum error reached 30%. Hesse and Andres [6] used…”
Section: Introductionmentioning
confidence: 99%
“…Wang et al [4] designed a multiphase scroll pump and analyzed the effects of gas volume fraction and rotation speed on the performance of scroll pump using the CFD method. Yue et al [5] established the transient model of the scroll vacuum pump on the basis of dynamic mesh technology with the fluent code; three cases including under-compression, slight over-compression and over-compression were calculated and compared with the experimental results; the maximum error reached 30%. Hesse and Andres [6] the Twinmesh and CFX to simulate the scroll vane pump with leakage transiently; the results indicated that the simulation can capture the working mechanism and flow conditions in the dry scroll vacuum pump.…”
Section: Introductionmentioning
confidence: 99%