2018
DOI: 10.1016/j.surfcoat.2018.07.015
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Compressive stress in nano-crystalline titanium dioxide films by aerosol deposition

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Cited by 29 publications
(20 citation statements)
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“…Owing to the strong impaction during deposition, PAD films may exhibit certain distorted crystal regions up to a degree of complete amorphization. [ 33,66 ] Furthermore, there are high internal compressive strains that are present as isotropic biaxial stresses [ 71 ] and that can reach values of up to 2 GPa. [ 72 ] A more detailed description of the aerosol deposition process, its deposition mechanism, and the resulting film properties can be found in overview articles of Akedo's group from 2008 [ 12 ] and more recently of our group from 2015.…”
Section: Powder Aerosol Depositionmentioning
confidence: 99%
“…Owing to the strong impaction during deposition, PAD films may exhibit certain distorted crystal regions up to a degree of complete amorphization. [ 33,66 ] Furthermore, there are high internal compressive strains that are present as isotropic biaxial stresses [ 71 ] and that can reach values of up to 2 GPa. [ 72 ] A more detailed description of the aerosol deposition process, its deposition mechanism, and the resulting film properties can be found in overview articles of Akedo's group from 2008 [ 12 ] and more recently of our group from 2015.…”
Section: Powder Aerosol Depositionmentioning
confidence: 99%
“…Several up-to-now-used AD materials, mainly metal oxides resemble lunar soil or dust in their particle size distributions [15,22]. Examples for the successful application of the AD method for the processing of metal oxide powders include, e.g., Fe 2 O 3 [23], SiO 2 [24,25], TiO 2 , [26,27], and Al 2 O 3 [16,28,29], or high temperature superconductors [30]. To the best of the authors’ knowledge, AD is the only process to produce dense ceramic coatings in the specified particle size range directly from dry powder and without any heat treatment.…”
Section: Introductionmentioning
confidence: 99%
“…Due to intensive research in the past years, it is now possible to deposit a large number of ceramic powders on various substrate materials (ceramics, 12,13 metals, 1,14 polymers, [15][16][17]. Besides familiar ceramics for the AD such as Al 2 O 3 , 5,[18][19][20] PZT, 2,17,21 BaTiO 3 , [22][23][24] and TiO 2 , 25 further functional ceramics, [26][27][28][29][30][31][32][33][34] and partly exotic materials, such as lunar regolith, 35 can be deposited today. In addition, more and more powder mixtures are being used.…”
Section: Introductionmentioning
confidence: 99%