Comprehensive simulation study on AlN, ZnO, and PZT-5H piezoelectric materials for microcantilever-based MEMS energy harvesters: Mechanical and electrical insights
Mahammadrafeeq Manvi,
K B Mruthyunjaya Swamy
Abstract:The piezoelectric effect involves the generation of electric charge in specific materials when subjected to mechanical stress or strain. This phenomenon is utilized in applications such as sensors, actuators, and energy harvesters. Microelectromechanical systems (MEMS) based piezoelectric energy harvesters are especially useful for powering microelectronic devices and sensors, reducing dependency on batteries in situations where regular battery maintenance and/or replacement is either difficult or impractical.… Show more
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