Comprehensive Evaluation of Hazardous Chemical Exposure Control System at a Semiconductor Manufacturing Company in South Korea

Abstract

The goal of this study was to evaluate the hazardous chemical exposure control system in a semiconductor manufacturing company and recommend an appropriate exposure surveillance system for hazardous agents. We reviewed compliance-based chemical exposure data compiled between 2012 and 2014 by the study company. The chemical management system, characteristics of chemical use and hazardous gas monitoring system were also investigated. We evaluated the airborne isopropyl alcohol (IPA) and acetone generally used as cleaning solvents, volatile organic compounds and metals levels using internationally recommended sampling and analytical methods. Based on the results of past working environment measurement data and of our investigation, the overall current exposure to chemicals by semiconductor workers during routine production work appears to be controlled below occupational exposure limits. About 40% of chemical products used were found to contain at least one unidentifiable trade-secret substance. There are several situations and maintenance tasks that need special attention to reduce exposure to carcinogens as much as possible. In addition, a job-exposure matrix as a tool of surveillance system that can examine the exposure and health status of semiconductor workers according to type of operation and type of job or task is recommended.

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